2017
DOI: 10.1149/2.1231714jes
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Electrochemical Atomic Layer Deposition of CuIn(1-x)GaxSe2on Mo Substrate

Abstract: The chalcopyrite CuIn (1-x) Ga x Se 2 (CIGS) thin films were grown on Mo substrate by electrochemical atomic layer deposition (E-ALD) of superlattice sequencing 2InSe/2GaSe/1CuSe, recently developed on model Au surface by Stickney and coworkers (J. Electrochem. Soc. 161, D141 (2014)). The cyclic voltammetry studies were conducted on copper, selenium, indium and gallium on molybdenum substrate and CIGS films were grown by different numbers of superlattice sequencing. The deposited films were examined for phase … Show more

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Cited by 5 publications
(15 citation statements)
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References 54 publications
(119 reference statements)
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“…The chemical composition of the film was determined by energy dispersive X‐ray spectroscopy (EDS, Horiba EX‐250; Minami, Kyoto, Japan). Topography of the film was investigated by scanning tunneling microscopy (STM, Agilent 5100 AFM/SPM; Santa Clara, CA, USA) with electrochemically etched tungsten tip . The film thickness from side‐view image was studied by high‐resolution scanning electron microscope (HR‐SEM, Hitachi S‐4800; Chiyoda, Tokyo, Japan).…”
Section: Methodsmentioning
confidence: 99%
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“…The chemical composition of the film was determined by energy dispersive X‐ray spectroscopy (EDS, Horiba EX‐250; Minami, Kyoto, Japan). Topography of the film was investigated by scanning tunneling microscopy (STM, Agilent 5100 AFM/SPM; Santa Clara, CA, USA) with electrochemically etched tungsten tip . The film thickness from side‐view image was studied by high‐resolution scanning electron microscope (HR‐SEM, Hitachi S‐4800; Chiyoda, Tokyo, Japan).…”
Section: Methodsmentioning
confidence: 99%
“…A handful of semiconductor compounds have been synthesized by E‐ALD techniques, including CIS and CIGS . Wang et al .…”
Section: Introductionmentioning
confidence: 99%
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“…1 After CIGS films were successfully grown on Mo foil, the CdS binary compound deposition steps were carried out over the top of CIGS/Mo foil. 1 After CIGS films were successfully grown on Mo foil, the CdS binary compound deposition steps were carried out over the top of CIGS/Mo foil.…”
Section: Mo/cigs/cds Structures By E-aldmentioning
confidence: 99%
“…1 CIGS is one of the promising candidates for highefficiency and low-cost solar power generation thin film photovoltaic materials. 1 CIGS is one of the promising candidates for highefficiency and low-cost solar power generation thin film photovoltaic materials.…”
Section: Introductionmentioning
confidence: 99%