2003
DOI: 10.1007/s10008-003-0378-8
|View full text |Cite
|
Sign up to set email alerts
|

Electrochemical deposition of Bi 2 Te 3 for thermoelectric microdevices

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4

Citation Types

0
48
0

Year Published

2007
2007
2015
2015

Publication Types

Select...
5
3
1

Relationship

1
8

Authors

Journals

citations
Cited by 88 publications
(48 citation statements)
references
References 10 publications
0
48
0
Order By: Relevance
“…[1][2][3][4] The Bi 2 Te 3 based alloys are known as the most readily available thermoelectric (TE) materials for power generation and refrigeration at temperatures relatively near room temperature. 5 The performance of TE is determined by the figure of merit (ZT = S 2 σT/k), where S is the TE power, i.e., Seebeck coefficient, σ is the electrical conductivity and k is the thermal conductivity, respectively.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] The Bi 2 Te 3 based alloys are known as the most readily available thermoelectric (TE) materials for power generation and refrigeration at temperatures relatively near room temperature. 5 The performance of TE is determined by the figure of merit (ZT = S 2 σT/k), where S is the TE power, i.e., Seebeck coefficient, σ is the electrical conductivity and k is the thermal conductivity, respectively.…”
Section: Introductionmentioning
confidence: 99%
“…1) Recently, various works have been conducted to apply thermoelectric thin films to micro-devices such as thermopile sensors and micro-coolers. [2][3][4][5][6] Thermopile sensors processed with thermoelectric materials convert heat energies generated by various physical signals and chemical reactions into electrical signals. [7][8][9] With advantages of high sensitivity, no offset, and no need for biasing, they can be utilized to various applications such as infrared sensor, microcalorimeter, psychrometer, RMS converter, EM-field sensor, flow meter, vacuum sensor, and accelerometer.…”
Section: Introductionmentioning
confidence: 99%
“…2,6,11,12) While various processing techniques such as evaporation, metal-organic chemical vapor deposition, molecular beam epitaxy, and electrodeposition can be used for thermoelectric thin-film fabrication, electrodeposition is attractive because it is a rapid and low-cost method as well as a low-temperature process. 2,5,6,[12][13][14][15][16] While various works were carried out for thermopile sensors of cross-plane configuration, 6,[17][18][19] a thermopile sensor of in-plane configuration has its advantage in fabrication because of easy formation of in-plane thin-film legs by using electrodeposition. In this study, the n-type bismuth telluride (Bi-Te) and the p-type antimony telluride (Sb-Te) thin films were electrodeposited to fabricate thermopile sensors composed of the Bi-Te and the Sb-Te thinfilm legs.…”
Section: Introductionmentioning
confidence: 99%
“…Bulk materials of Bi 2 Te 3 have been widely integrated in TE devices used in thermoelectric coolers and power generators. However, Bi 2 Te 3 thin films promise higher TE efficiency because the TE power of bulk materials can be enhanced through the chaining and stacking of Bi 2 Te 3 films [2]. As shown by Boikov et al [3], the lattice thermal conductivity of chalcogenide films is considerably lower than that of bulk crystals of similar compositions, leading to an increase of the figure of merit of films.…”
Section: Introductionmentioning
confidence: 99%