2011
DOI: 10.1149/1.3553346
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Electrochemical Etching of Zinc Oxide for Silicon Thin Film Solar Cell Applications

Abstract: A novel approach is presented for introducing a surface morphology with beneficial light scattering properties to sputter-deposited ZnO:Al films, being used as front contact in Si thin film photovoltaic devices. Electrochemical anodization was used to trigger local corrosion, leading to interfacial structures complementary to those commonly prepared by an etching step in diluted HCl. By systematic variation of electrochemical etching conditions and electrolytes, sensible experimental parameters were evaluated … Show more

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