“…The deposition of intermetallic alloy films (including HEAs) has been reported using various physical vapour deposition (PVD) techniques such as pulsed laser deposition, laser cladding, ion sputtering, ion plating, RF-magnetron sputtering, or flash evaporation-deposition [ 6 , 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. Amongst multicomponent thin films on different alloy substrates and powders are also thin films of hydrogen storage materials (HSMs, e.g., LaNi 5 type) on different substrates [ 13 , 19 , 20 , 21 , 22 ]. The utilisation of sputtered intermetallic thin films of HSMs is considered beneficial because of their higher thermal conductivity, improved resistance to hydrogen pulverisation, and high efficiency of protective and catalytic layers as compared with their bulk counterparts [ 13 , 19 , 23 , 24 ].…”