2019
DOI: 10.1016/j.jallcom.2018.09.034
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Electrochemical investigation and modelling of LaNi4.77Al0.23 thin-films sputtered on glass wafers

Abstract: In the present work, we report on the microfabrication of metal hydride thin-film electrodes which can be utilized for rechargeable microbatteries or sensor applications. A multi-layer deposition technique is developed based on physical vapor deposition to fabricate the thin-film electrodes on a glass substrate. The morphology and the structure of the thin-film electrodes are studied by using Field Emission Scanning Electron Microscopy coupled with an Energy Dispersive Spectroscopy module. The surface composit… Show more

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Cited by 3 publications
(4 citation statements)
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“…The deposition of intermetallic alloy films (including HEAs) has been reported using various physical vapour deposition (PVD) techniques such as pulsed laser deposition, laser cladding, ion sputtering, ion plating, RF-magnetron sputtering, or flash evaporation-deposition [ 6 , 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. Amongst multicomponent thin films on different alloy substrates and powders are also thin films of hydrogen storage materials (HSMs, e.g., LaNi 5 type) on different substrates [ 13 , 19 , 20 , 21 , 22 ].…”
Section: Introductionmentioning
confidence: 99%
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“…The deposition of intermetallic alloy films (including HEAs) has been reported using various physical vapour deposition (PVD) techniques such as pulsed laser deposition, laser cladding, ion sputtering, ion plating, RF-magnetron sputtering, or flash evaporation-deposition [ 6 , 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. Amongst multicomponent thin films on different alloy substrates and powders are also thin films of hydrogen storage materials (HSMs, e.g., LaNi 5 type) on different substrates [ 13 , 19 , 20 , 21 , 22 ].…”
Section: Introductionmentioning
confidence: 99%
“…The deposition of intermetallic alloy films (including HEAs) has been reported using various physical vapour deposition (PVD) techniques such as pulsed laser deposition, laser cladding, ion sputtering, ion plating, RF-magnetron sputtering, or flash evaporation-deposition [ 6 , 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. Amongst multicomponent thin films on different alloy substrates and powders are also thin films of hydrogen storage materials (HSMs, e.g., LaNi 5 type) on different substrates [ 13 , 19 , 20 , 21 , 22 ]. The utilisation of sputtered intermetallic thin films of HSMs is considered beneficial because of their higher thermal conductivity, improved resistance to hydrogen pulverisation, and high efficiency of protective and catalytic layers as compared with their bulk counterparts [ 13 , 19 , 23 , 24 ].…”
Section: Introductionmentioning
confidence: 99%
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