CHIRP systems are widely used in seabed sediment classification, submarine faults, positioning of marine engineering structures, pipeline geotechnical studies, platform and well area assessments, archaeological and environmental impact assessments. The resolution of the system is in the order of decimeter. In this study, the characteristics of submarine active faults, buried faults, seabed and underlying layers in the region were analyzed and interpreted by CHIRP data collected off-shore Seferihisar, Teke Peninsula and Alaçatı.