2019
DOI: 10.1063/1.5110889
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Electrochemical memristive devices based on submonolayer metal deposition

Abstract: This paper explores the concept of an analog memristive device based on reversible electrochemical deposition and deplating of a submonolayer metal layer on a 108 Ω resistive bar. Initial feasibility experiments demonstrate a continuous resistance change by seven orders of magnitude during physical vapor deposition of Cu on TaNx/SOI, with the most promising range from 5.6 × 107 to 1.1 × 107 Ω/□ during a 0.64 monolayer Cu deposition. Cyclic electrochemical deposition and deplating of Cu on a metal seed on SiO2 … Show more

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Cited by 8 publications
(3 citation statements)
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“…24 Inconel-625 and salt layer deposition.-50 nm thick Inconel-625 films are sputter deposited onto silicon-oxy-nitride Hummingbird TEM heater-chips in a ultra-high vacuum deposition system with a base pressure below 10 −8 Torr. [26][27][28] Deposition is done in 5.0 mTorr 99.999% Ar by applying a constant dc power of 200 W to a magnetron with a 5 cm diameter Inconel-625 target while maintaining the substrate temperature at 600 °C. Immediately following the deposition, the entire chip is annealed stepwise at 700 °C, 800 °C, 900 °C, and 1000 °C for 30 min each in the same vacuum system.…”
Section: Methodsmentioning
confidence: 99%
“…24 Inconel-625 and salt layer deposition.-50 nm thick Inconel-625 films are sputter deposited onto silicon-oxy-nitride Hummingbird TEM heater-chips in a ultra-high vacuum deposition system with a base pressure below 10 −8 Torr. [26][27][28] Deposition is done in 5.0 mTorr 99.999% Ar by applying a constant dc power of 200 W to a magnetron with a 5 cm diameter Inconel-625 target while maintaining the substrate temperature at 600 °C. Immediately following the deposition, the entire chip is annealed stepwise at 700 °C, 800 °C, 900 °C, and 1000 °C for 30 min each in the same vacuum system.…”
Section: Methodsmentioning
confidence: 99%
“…Commonly used physical deposition techniques include sputtering, atomic layer deposition, e-beam deposition, and pulsed laser deposition. However, given that cost-effectiveness and ease of solution processability are crucial for the fabrication of RS devices, chemical approaches have become more widespread, including hydrothermal methods [ 23 , 24 ], spray deposition [ 25 ], SILAR [ 26 ], spin coating [ 27 , 28 ], drop-casting [ 29 ], microwave [ 30 ], screen printing [ 31 , 32 ], doctor blading, and electrochemical methods [ 33 ]. In terms of the direction and advancement of RS performance, it is essential to comprehend the impact of synthesis procedures, including the cost.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, the development and investigation of memristive structures, in which the SOI substrate acts as an electrode, is of considerable theoretical and practical interest. However, such data are nearly absent in the literature, except for several separate reports on the use of SOI in memristive devices (see, for example, [47][48][49][50]).…”
Section: Introductionmentioning
confidence: 99%