Electrochemically Deposited Nanograin Ruthenium Oxide as a Pseudocapacitive Electrode

Gujar, T.P.; Kim, Woo Young; Puspitasari, Indra; Jung, Kwang‐Deog; Joo, Oh‐Shim

doi:10.1016/s1452-3981(23)17102-1

Cited by 90 publications

(2 citation statements)

References 15 publications

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“…It is well known that RuO 2 has characteristics XRD peaks at 2θ = 30°, 35°. 78,79 No RuO x signal could be detected even on free Ru surface samples annealed at 600°C and 900°C in our samples. No direct oxidation of Ru at an elevated temperature in a furnace has been performed as RuO x was not planned for part of the manufactured layer system shown in Fig.…”

Section: Xrd Studies Of Layer Systems For Ru Devices a And Bmentioning

confidence: 55%

Thermal and Chemical Integrity of Ru Electrode in Cu/TaO_x/Ru ReRAM Memory Cell

Al‐Mamun

King

Orłowski

2019

ECS J. Solid State Sci. Technol.

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A good candidate for replacing the inert platinum (Pt) electrode in the well-behaved Cu/TaOx/Pt resistive RAM memory cell is ruthenium (Ru), already successfully deployed in the CMOS back end of line. We benchmark Cu/TaOx/Ru device against Cu/TaOx/Pt and investigate the impact of embedment of Cu/TaOx/Ru on two different substrates, Ti(20nm)/SiO2(730nm)/Si and Ti(20nm)/TaOx(30nm)/SiO2(730nm)/Si, on the cell's electrical performance. While the devices show similar switching performance at some operating conditions, there are notable differences at other operation regimes shedding light on the basic switching mechanisms and the role of the inert electrode. The critical switching voltages are significantly higher for Ru than for Pt devices and can be partly explained by the work function difference and different surface roughness of the inert electrode. The poorer switching properties of the Ru device are attributed to the degraded inertness properties of the Ru electrode as a stopping barrier for Cu+ ions as compared to the Pt electrode. However, some of the degraded electrical properties of the Ru devices can be mitigated by an improved integration of the device on the Si wafer. This improvement is attributed to the suppression of crystallization of Ru and its silicidation reactions that take place at elevated local temperatures, present mainly during the reset operation. This hypothesis has been corroborated by extensive XRD studies of multiple layer systems annealed at temperatures between 300K and 1173K.

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Section: Xrd Studies Of Layer Systems For Ru Devices a And Bmentioning

confidence: 55%

Thermal and Chemical Integrity of Ru Electrode in Cu/TaO_x/Ru ReRAM Memory Cell

Al‐Mamun

King

Orłowski

2019

ECS J. Solid State Sci. Technol.

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“…The area under the CV curve increases gradually with the increase in scan rate. The CV current is proportionate to the scan rate [32]. The specific capacitance was determined, ranging from 10 mV/s to 100 mV/s.…”

Section: The Electrochemical Studiesmentioning

confidence: 99%

Investigation of alkaline earth element substituted Lanthanum Ferrite nanoparticles and it’s characterization

Saseetha,

Nagarajan,

Subha

et al. 2024

JOR

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Pure Lanthanum Ferrite (LaFeO3) nanoparticles and Lanthanum Magnesium Ferrite (LaMgxFe1-xO3) nanocomposites have been prepared by the sol-gel auto-combustion method. The structural and morphological properties were investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM) and energy dispersive X-ray (EDAX) spectroscopy. Powder XRD studies revealed that the samples are pure orthorhombic perovskite crystals with a size of around 20–50 nm. The FT-IR spectra of pure and composites was confirmed the formation perovskite structure. It has been discovered that composites material functions as an electrode in supercapacitors after its electrical characteristics have been examined by galvanostatic charging and discharging (GCD), cyclic voltammetry (CV), and electrochemical impedance spectroscopy (EIS) with a 2 M KOH electrolyte.

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Ultrathin Mesoporous RuCo₂O₄Nanoflakes: An Advanced Electrode for High‐Performance Asymmetric Supercapacitors

et al. 2017

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A new ruthenium cobalt oxide (RuCo O ) with a unique marigold-like nanostructure and excellent performance as an advanced electrode material has been successfully prepared by a simple electrodeposition (potentiodynamic mode) method. The RuCo O marigolds consist of numerous clusters of ultrathin mesoporous nanoflakes, leaving a large interspace between them to provide numerous electrochemically active sites. Strikingly, this unique marigold-like nanostructure provided excellent electrochemical performance in terms of high energy-storage capacitance (1469 F g at 6 A g ) with excellent rate proficiency and long-lasting operating cycling stability (ca. 91.3 % capacitance retention after 3000 cycles), confirming that the mesoporous nanoflakes participate in the ultrafast electrochemical reactions. Furthermore, an asymmetric supercapacitor was assembled using RuCo O (positive electrode) and activated carbon (negative electrode) with aqueous KOH electrolyte. The asymmetric design allowed an upgraded potential range of 1.4 V, which further provided a good energy density of 32.6 Wh kg (1.1 mWh cm ). More importantly, the cell delivered an energy density of 12.4 Wh kg even at a maximum power density of 3.2 kW kg , which is noticeably superior to carbon-based symmetric systems.

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Electrochemically Deposited Nanograin Ruthenium Oxide as a Pseudocapacitive Electrode

Cited by 90 publications

References 15 publications

Thermal and Chemical Integrity of Ru Electrode in Cu/TaO_x/Ru ReRAM Memory Cell

Thermal and Chemical Integrity of Ru Electrode in Cu/TaO_x/Ru ReRAM Memory Cell

Investigation of alkaline earth element substituted Lanthanum Ferrite nanoparticles and it’s characterization

Ultrathin Mesoporous RuCo₂O₄Nanoflakes: An Advanced Electrode for High‐Performance Asymmetric Supercapacitors

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Electrochemically Deposited Nanograin Ruthenium Oxide as a Pseudocapacitive Electrode

Cited by 90 publications

References 15 publications

Thermal and Chemical Integrity of Ru Electrode in Cu/TaOx/Ru ReRAM Memory Cell

Thermal and Chemical Integrity of Ru Electrode in Cu/TaOx/Ru ReRAM Memory Cell

Investigation of alkaline earth element substituted Lanthanum Ferrite nanoparticles and it’s characterization

Ultrathin Mesoporous RuCo2O4Nanoflakes: An Advanced Electrode for High‐Performance Asymmetric Supercapacitors

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Product

Resources

About

Thermal and Chemical Integrity of Ru Electrode in Cu/TaO_x/Ru ReRAM Memory Cell

Thermal and Chemical Integrity of Ru Electrode in Cu/TaO_x/Ru ReRAM Memory Cell

Ultrathin Mesoporous RuCo₂O₄Nanoflakes: An Advanced Electrode for High‐Performance Asymmetric Supercapacitors