Electrochemically Synthesized Tin/Lithium Alloy To Convert Laser Light to Extreme Ultraviolet Light

Abstract

This paper describes lithium–tin alloys as a novel target material to enhance the efficiency of 13.5 nm extreme ultraviolet (EUV) light from generated laser-produced plasmas. Both lithium and tin exhibit EUV emission with the same peak at 13.5 nm. We show that lithium–tin (LiSn) alloys exhibit emission also at 13.5 nm and a mixture of tin and lithium emission by illuminating Nd:YAG laser (1 ns, 2.5 × 10 10 , 7.1 × 10 10 W/cm 2 ). The emission spectra and emission angular distribution by using phosphor imaging plates were analyzed to obtain the conversion efficiency from laser light to 13.5 nm light. The Li–Sn alloys were slightly higher than planar tin and between tin and lithium. It would be due to the suppression of self-absorption of 13.5 nm light by the tin plasma.

Simulation of Extreme Ultraviolet Radiation and Conversion Efficiency of Lithium Plasma in a Wide Range of Plasma Situations

“…In order to improve the EUVCE of lithium plasma, some researchers have proposed some technical solutions, including a tin-lithium mixture and the use of DPP technology [15]. However, these attempts did not make significant progress in EUVCE.…”

Easy-handling minimum mass laser target scaffold based on sub-millimeter air bubble -An example of laser plasma extreme ultraviolet generation-

“…Synthesis of well-defined low density tin targets have a merit for supporting a wide range of materials consisting of various elements, exact shape, pore size, density etc [16][17][18][19][20] . Plasma generated from low density materials or nanostructured targets have a reduced opacity, increasing the CE as the plasma becomes less dense 6,[18][19][20][21][22][23][24][25][26] . Moreover, the flexibility of materials science is exciting for quantum beam sources; the desired wavelength of light can be selected based on specific elements supported by a low density scaffold.…”