Modern Electroplating 2010
DOI: 10.1002/9780470602638.ch2
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Electrodeposition of Copper

Abstract: Polyethylene oxides, glycols, and amines U.S.5,024,736 6/18/91 Clauss et al. Disubstituted ethane sulfonic compounds U.S.4,990,224 2/5/91 Mahmoud Urea, sodium lauryl sulfate, and tosyl or mesyl sulfonic acid U.S.4,975,159 12/4/90 Dahms Alkoxylated lactam amides U.S.4,954,226 9/4/90 Mahmoud Urea and glycerin U.S.4,948,474 8/14/90 Miljkovic Alkylarylene U.S.4,897,165 1/30/90 Bernards et al. Copper/sulfuric acid ratios U.S.4,781,801 11/1/88 Frisby Polyether surfactants þ sulfurized benzene þ grain refiner U.S.4,6… Show more

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Cited by 53 publications
(42 citation statements)
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References 274 publications
(333 reference statements)
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“…This resulted in a decrease of phase segregation in the absorber, with an efficiency improvement from 0.8% to 3.2% . Copper is relatively inert in most plating solutions of other metals and is highly conductive, making it an excellent under‐layer for the following elements to be deposited . Other reported approaches for stack ordering are Zn/Cu/Sn and Sn/Cu/Zn , but no devices are reported from these alternative stacks.…”
Section: Detailed Kesterite Electrodeposition Reviewmentioning
confidence: 99%
“…This resulted in a decrease of phase segregation in the absorber, with an efficiency improvement from 0.8% to 3.2% . Copper is relatively inert in most plating solutions of other metals and is highly conductive, making it an excellent under‐layer for the following elements to be deposited . Other reported approaches for stack ordering are Zn/Cu/Sn and Sn/Cu/Zn , but no devices are reported from these alternative stacks.…”
Section: Detailed Kesterite Electrodeposition Reviewmentioning
confidence: 99%
“…Lowering the acid significantly improves the thickness uniformity and planarity of the electroplated copper layer, which is also of benefit in the chemical-mechanical planarization processes [11][12][13][14][15]. The main species of the electrolyte solutions are copper sulfate (CuSO 4 Á5H 2 O).…”
Section: Solutions For Electroplating Of Coppermentioning
confidence: 99%
“…9 The composition of the bath was 100 g/L CuSO 4 .5H 2 O (Fisher Scientific), 270 g/L H 2 SO 4 (Fisher Scientific), and 0.1 g/L NaCl. A large area (70 cm 2 ) Cu foil counter electrode was used, which was placed at a distance of 10 cm from the working electrode.…”
Section: Electrolessmentioning
confidence: 99%
“…Additive-free Cu electroplating baths were employed (which contained ppm-levels of chloride) because these baths are known to minimize stress in electroplated films. 9 Additives-containing electrolytes may be used after optimization of the plating conditions that provide minimal stress in thick deposits. The tape test results, even after aggressive cross-hatching, confirm the superior adhesion of thick (∼100 μm) electroplated Cu films to glass.…”
Section: Wettability Of Aptes-modified Glass Surfaces-mentioning
confidence: 99%