Electroforming Process and Application to Micro/Macro Manufacturing

McGeough, J. A.; Leu, Ming-Chuan; Rajurkar, K. P.; Silva, A.K.M. De; Liu, Q.

doi:10.1016/s0007-8506(07)62990-4

Cited by 216 publications

(122 citation statements)

References 16 publications

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“…The mould insert is made of nickel (Ni), obtained using an electroforming deposition process [9,10]. The primary master geometry used for deposition is made of aluminium and generated by ultra-high-precision diamond cutting technology and it is subsequently replicated by nickel electroforming.…”

Section: Toolingmentioning

confidence: 99%

Surface wear of TiN coated nickel tool during the injection moulding of polymer micro Fresnel lenses

et al. 2012

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Section: Toolingmentioning

confidence: 99%

Surface wear of TiN coated nickel tool during the injection moulding of polymer micro Fresnel lenses

et al. 2012

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“…Among many manufacturing techniques, an electroplating is commonly used to deposit the thick metallic microstructures on a substrate due to its capability to fulfill high aspect ratio requirement, simplicity of fabrication and employability of inexpensive tools and chemicals. Hence, the electroplating technique is often chosen for low-cost MEMS mass production [8][9].…”

Section: Introductionmentioning

confidence: 99%

Modification of a Substrate Roughness for a Fabrication of Freestanding Electroplated Metallic Microstructures

Pimpin

Srituravanich

2017

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Abstract.This study aims to demonstrate a simple fabrication technique of freestanding electroplated metallic microstructures by modifying a substrate roughness. The proposed technique utilizes counter effects between two forces, i.e. an intrinsic force causing shrinkage in an electroplated metallic microstructure, and an adhesive force adhering a metallic microstructure to a substrate. With the modification of substrate roughness until the adhesive force becomes weaker than the induced intrinsic force, electroplated metallic microstructures would spontaneously release from the substrate after the electroplating process. Three parameters, i.e. substrate roughness, electroplated square structure's area and electroplated rectangular structure's width-to-length ratio, were experimentally studied. The results showed that the electroplated structure with a smaller size and smaller width-to-length ratio was more easily detached from the substrate for a given substrate roughness. In addition, for the same electroplated structure, a substrate with less roughness allowed a detachment of electroplated microstructure more easily.

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“…Electroforming can replicate the shape and microstructure of a master surface with high accuracy. Thus, this method has played an important role in industry in the fabrication of microelectromechanical systems (MEMS), precision molding and precision optics 1), 2) . Because of its shape replication accuracy, it is applied to the fabrication of high-precision mirrors used for x-ray microscopy that require shape accuracy of 1 nm order 3) .…”

Section: Introductionmentioning

confidence: 99%

Development of internal stress measurement technique for Ni electroforming using Shack.Hartmann sensor

Kume

Egawa

Mimura

2016

IJEM

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The performance of an in situ internal stress measurement technique using a Shack-Hartmann sensor (SHS) is examined during nickel electrodeposition in concentrated nickel sulfamate solution. The stress is calculated from the change in the curvature of a test plate bent by stress. The curvature is measured by monitoring the wavefront of an expanded laser beam reflected at the substrate using an SHS. Applying the proposed method, curvature measurements were conducted and the repeatability and accuracy were estimated. In situ stress measurement with a current density of 2.1 mA/cm 2 revealed a repeatability of approximately 1 MPa when the thickness of the nickel layer was

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Electroforming Process and Application to Micro/Macro Manufacturing

Cited by 216 publications

References 16 publications

Surface wear of TiN coated nickel tool during the injection moulding of polymer micro Fresnel lenses

Surface wear of TiN coated nickel tool during the injection moulding of polymer micro Fresnel lenses

Modification of a Substrate Roughness for a Fabrication of Freestanding Electroplated Metallic Microstructures

Development of internal stress measurement technique for Ni electroforming using Shack.Hartmann sensor

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