2011
DOI: 10.1109/jmems.2011.2105254
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Electroless Deposition and Structuring of Silver Electrodes in Closed Microfluidic Capillaries

Abstract: The deposition of electrodes as the final step in the microfabrication of a fluidic system avoids incompatibilities with the microfabrication, i.e., high-temperature steps, or the process environment, i.e., CMOS fabrication. The employed strategy to deposit and structure silver (Ag) electrodes in microfluidic capillaries (cross-sectional length less than 10 μm) is presented. First, the adhesion of the Ag layer to the silicon dioxide (SiO 2 ) surface of the capillary was improved with an intermediate mercapto s… Show more

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Cited by 11 publications
(4 citation statements)
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“…As a disadvantage, this oxidation of Ag or AgCl leads to an altering and the consummation of the electrodes during pumping, and they need to be regenerated by changing the pumping direction. Ag electrodes can be electroless deposited into the capillaries of the SIP [101] and further partially transformed into Ag/AgCl based on an oxidation with ferric chloride (FeCl3). First experiments using polymeric capillaries with 65 μm channels a flow rate of 0.12 nL•s −1 •V −1 was obtained [102].…”
Section: Electro-osmotic Pumpmentioning
confidence: 99%
“…As a disadvantage, this oxidation of Ag or AgCl leads to an altering and the consummation of the electrodes during pumping, and they need to be regenerated by changing the pumping direction. Ag electrodes can be electroless deposited into the capillaries of the SIP [101] and further partially transformed into Ag/AgCl based on an oxidation with ferric chloride (FeCl3). First experiments using polymeric capillaries with 65 μm channels a flow rate of 0.12 nL•s −1 •V −1 was obtained [102].…”
Section: Electro-osmotic Pumpmentioning
confidence: 99%
“…[3][4][5] One of the less well explored applications of laminar ow is its use as a patterning technique, here termed laminar ow lithography (LFL) wherein reactive uids (etchants or additive deposition solutions) are restricted to specic regions of a microchannel to perform patterning processes. In the literature, LFL has been implemented to modify the surface structure of a microchannel (using a three-stream ow of HF etchant and water in monolithic glass devices creating cylindrical proles), 6 selectively deposit material into channels (using multi-stream ows with electroless plating solutions), [7][8][9][10] etch single metal layers, 11 and achieve combinations thereof. 12,13 To date, the utility of LFL as a general microfabrication technique for patterning multi-layer multi-electrode geometries remains unexplored.…”
Section: Laminar Ow and Laminar Ow Lithographymentioning
confidence: 99%
“…With seeded growth the silica core is usually functionalized (Jackson and Halas, 2001;Kim et al, 2008;Choma et al, 2011), most commonly with either metal ions 20 such as tin (Choma et al, 2012) or an alkoxysilane terminated by either an amine (Kim et al, 2008;Choma et al, 2011;Brinson et al, 2008) or a thiol group (Heuck and Staufer, 2011). The metal nanoparticles are synthesized separately from the silica spheres, and added after the core particle is functionalized.…”
Section: Introductionmentioning
confidence: 99%