Electroluminescence from Alq₃-Containing Electron-Beam Resists for Light-Emitting Organic Nanometer-Scale Devices

Abstract

A simple method was developed for fabricating current-drivable light-emitting organic structures with lateral sizes on the nanometer scale. Appropriate synthesis conditions for organic electron-beam (EB) resist copolymers of ZEP520A containing 8-hydroxyquinoline aluminum (Alq3) were determined for the structures. Square layer structures with side lengths of less than 1 μm were fabricated using this composite resist simply by EB exposure and development. Green electroluminescence attributed to the emission from Alq3 was observed from the devices with the composite resist. This method opens the door to the development of organic quantum-information devices, near-field optical microscopy, nanoscale photopatterning, high-resolution light-emitting diodes, and highly sensitive biosensors.