“…As the core component of the micro-fluid control system, the output performance of the micro pump determines the characteristics of the entire system. According to different driving methods, micro pumps can be divided into electromagnetic pumps (Mi et al, 2020;Rusli et al, 2018) heat pumps (Feng et al, 2021;Skye and Wu, 2021), pneumatic pumps (Hamid et al, 2017;Ma et al, 2019), shape memory pumps (Robertson et al, 2016) and piezoelectric pumps (Huang et al, 2020;Ma et al, 2016;Ma et al, 2015). Among them, piezoelectric pumps have attracted more and more attention for their outstanding advantages such as high energy density, fast response speed, large driving force, and easy integration.…”