A floating zone furnace is a powerful tool for single crystal growth. Here, we report the floating zone furnace using a high power diode laser of 1kW composed of five 200 Watt heating beams. The five beams with the designed irradiation intensity distribution enable the melt-growth of single crystals for refractory materials having a high melting temperature above 2000°C, volatile materials and even incongruent materials. The power of five beams in the horizontal plane provides uniform intensity in the outer circumference of the raw material rods, while the vertical direction power of five beams can be made to have a bell shape irradiation intensity so as to relax residual thermal stress in the grown single crystal. The present furnace enables one to directly monitor the temperature of the hot spot of raw material and the molten zone within a 1 mm diameter. Such an in-situ monitoring function of the temperature on the molten zone greatly enhances the controllability for optimizing the crystal growth condition.Ha(Y) on the Y-axis is measured by moving the thermocouple on the Y-axis direction. The obtained Ha(Y) on the Y-axis has a gaussian shape. The position at 10% of the maximum intensity of the halogen lamp in the Y direction is ±25mm from the center at Y-axis. The Ha(X) along the X-axis is the same as the Ha(Y) along the Y-axis. The green dashed line is calculated by assuming the four irradiation light beams with the same Ha(X). With a confocal elliptical mirror in the case of using two halogen lamps, the uniformity will be even worse, less than 50%. On the other hand, the red solid line in Fig. 3, which was calculated and reported also by Ito et al.[5], shows irradiation intensity distribution in the azimuthal direction of the raw material rod in both cases of type A with a flat shape and type B with a gaussian shape in the case of using LFZ. In this case, high uniformity of 95% or more can be ensured over 360° around the raw material rod. For the actual crystal growth procedure in