Electromechanical Coupling between Comb-Drive Actuators and Charge Pump Converters

Suppressing residual vibrations in comb-drive electrostatic actuators: A command shaping technique adapted to nomadic applications

“…Therefore, ASICs are used to control and to power the two-module actuators. These circuits integrate in particular voltage multiplier stages (one per module) in order to reach voltages of the order of 100 V from a button cell of 1.5 V or 3 V. In [28], such a voltage multiplier stage is rapidly described: i.e. an integrated charge pump characterized by an average rise time about 0.8 ms to reach a voltage of 110 V from 3 V. To illustrate this problem, the previous experimental set-up is used to generate a linear voltage rise from 0 V to 110 V in 0.8 ms. Figs.…”