Electromechanical Systems in Microtechnology and Mechatronics

Lenk, Arno; Ballas, Rüdiger G.; Werthschützky, Roland; Pfeifer, Günter

doi:10.1007/978-3-642-10806-8

Cited by 53 publications

(46 citation statements)

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“…It demonstrates the effectiveness of the employment of basic theories in the area of coupled mechanical and electrical systems and, as such, is closely related to the developments in mechatronics [46,47], and it points towards the possibility of reducing the expensive and time-consuming trialand-error fabrication procedures presently being used in the field. …”

Section: Discussionmentioning

confidence: 94%

Performance Study of Acoustophoretic Microfluidic Silicon-Glass Devices by Characterization of Material- and Geometry-Dependent Frequency Spectra

2017

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The mechanical and electrical response of acoustophoretic microfluidic devices attached to an ac-voltage-driven piezoelectric transducer is studied by means of numerical simulations. The governing equations are formulated in a variational framework that, introducing Lagrangian and Hamiltonian densities, is used to derive the weak form for the finite-element discretization of the equations and to characterize the device response in terms of frequency-dependent figures of merit or indicators. The effectiveness of the device in focusing microparticles is quantified by two mechanical indicators: the average direction of the pressure gradient and the amount of acoustic energy localized in the microchannel. Furthermore, we derive the relations between the Lagrangian, the Hamiltonian, and three electrical indicators: the resonance Q value, the impedance, and the electric power. The frequency response of the hard-to-measure mechanical indicators is correlated to that of the easy-to-measure electrical indicators, and, by introducing optimality criteria, it is clarified to which extent the latter suffices to identify optimal driving frequencies as the geometric configuration and the material parameters vary. The latter have been varied by considering both Pyrex and aluminium nitroxide top-lid materials.

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Section: Discussionmentioning

confidence: 94%

Performance Study of Acoustophoretic Microfluidic Silicon-Glass Devices by Characterization of Material- and Geometry-Dependent Frequency Spectra

2017

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“…The polySENS has been laid out for low-frequency measurements and consists of a piezoelectric unimorph cantilever connected to a seismic mass. In [11] a model for a mass loaded piezoelectric bimorph accelerometer can be found, in consequence a model of a corresponding unimorph type has to be derived. Therefore, a description of the unimorph cantilever transducer can be found in [12].…”

Section: Design and Theorymentioning

confidence: 99%

“…The Combined Simulation gives the opportunity to derive lumped sensor parameters with virtual experiments of more complex structures than a simple unimorph cantilever as the polySENS is. Figure 2 shows the lumped element model of a massloaded cantilever accelerometer corresponding to [11]. The piezoelectric transducer is described with the equations:…”

Section: M3p005mentioning

confidence: 99%

Piezoelectric accelerometer based on micro injection molded polymers

Schulze

Heinrich

Wegener

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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A polymer-based uniaxial accelerometer with piezoelectric polyvinylidene fluoride (PVDF) copolymer transducers and micro injection molded polypropylene (PP) structures has been designed, manufactured and characterized. The mass-loaded cantilever structure shows a quasi-static charge sensitivity of 0.69 pC/g and a resonance frequency of 735 Hz. Because of its efficient processing and its small dimensions the polymer-based sensor (polySENS) can be integrated into fiber-reinforced polymer structures in order to measure low-frequency vibrations. The focus of this contribution is on the design as well as on the characterization of the polySENS to determine the sensor properties of the accelerometer due to manufacturing particularities.

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“…Since the physical dimensions of the MEMSloudspeaker are small compared to audio wavelengths in air, it is possible to model the acoustic network using lumped elements. 15,31 In this paper, an electroacoustic analogy is used, which maps the acoustic pressure, p, to the electric voltage and the volume flux, q, to the electric current. The resulting acoustic lumped element model is depicted in Fig.…”

Section: This Leads Tomentioning

confidence: 99%

Magnetostrictive microelectromechanical loudspeaker

Albach

Lerch

2013

The Journal of the Acoustical Society of America

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A microelectromechnical-loudspeaker based on the magnetostrictive effect is presented. The membrane consists of a comb structure of monomorph bending cantilevers with an area of about 16 mm(2). Prototypes generate a sound pressure level (SPL) of up to 102 dB at 450 Hz with a total harmonic distortion of 2% inside a 2 cm(3) measurement volume. The fabrication process of the device as well as a coupled simulation model to calculate its sound pressure is introduced. The model reproduces the measurements and is employed to further optimize the loudspeaker membrane. As a result, a computed maximum SPL of 106 dB has been achieved with a -6 dB frequency range extending from 100 Hz to 2.6 kHz.

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Electromechanical Systems in Microtechnology and Mechatronics

Cited by 53 publications

References 0 publications

Performance Study of Acoustophoretic Microfluidic Silicon-Glass Devices by Characterization of Material- and Geometry-Dependent Frequency Spectra

Performance Study of Acoustophoretic Microfluidic Silicon-Glass Devices by Characterization of Material- and Geometry-Dependent Frequency Spectra

Piezoelectric accelerometer based on micro injection molded polymers

Magnetostrictive microelectromechanical loudspeaker

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