2007 IEEE International Interconnect Technology Conferencee 2007
DOI: 10.1109/iitc.2007.382343
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Electromigration Failure Mechanism and Lifetime Expectation for Bi-Modal Distribution in Cu/Low-k Interconnect

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“…The electromigration (EMG) phenomenon is becoming more and more critical for chip reliability since the 32 nm technology node [1][2][3]. In order to anticipate this reliability issue, EMG checks are done at design level based mainly on the electrical parameters [4].…”
Section: Introductionmentioning
confidence: 99%
“…The electromigration (EMG) phenomenon is becoming more and more critical for chip reliability since the 32 nm technology node [1][2][3]. In order to anticipate this reliability issue, EMG checks are done at design level based mainly on the electrical parameters [4].…”
Section: Introductionmentioning
confidence: 99%