2009 IEEE International Reliability Physics Symposium 2009
DOI: 10.1109/irps.2009.5173360
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Electromigration tests for critical stress and failure mechanism evaluation in Cu/W via/Al hybrid interconnect

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“…The amount of Pt loading was set to 0.9 mg Pt cm À2 for the anode and 1.7 mg Pt cm À2 for the cathode, respectively. Then, a sheet of membrane, a film of polybenzoxazine (pBOA)-pBI co-polymer, doped in 85 wt% phosphoric acid solution was sandwiched between the anode and cathode GDEs [13]. The size of the active area was 120 cm 2 , and graphite-based composite bipolar plates (w/phenolic resins), which have multi-serpentine channels, and 500-mm-thick FKM gaskets, which are placed around the circumference of the active area on both sides of an MEA, were used to build a six-cell assembly of MEAs and bipolar plates.…”
Section: Methodsmentioning
confidence: 99%
“…The amount of Pt loading was set to 0.9 mg Pt cm À2 for the anode and 1.7 mg Pt cm À2 for the cathode, respectively. Then, a sheet of membrane, a film of polybenzoxazine (pBOA)-pBI co-polymer, doped in 85 wt% phosphoric acid solution was sandwiched between the anode and cathode GDEs [13]. The size of the active area was 120 cm 2 , and graphite-based composite bipolar plates (w/phenolic resins), which have multi-serpentine channels, and 500-mm-thick FKM gaskets, which are placed around the circumference of the active area on both sides of an MEA, were used to build a six-cell assembly of MEAs and bipolar plates.…”
Section: Methodsmentioning
confidence: 99%