Electron beam induced etching of carbon

Martin, Aiden A.; McCredie, G.; Toth, Milos

doi:10.1063/1.4927593

Cited by 15 publications

(19 citation statements)

References 41 publications

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“…It must also be noted that residual H 2 O is abundant in the high vacuum systems normally used for EBIE, and it gives rise to electron induced oxidation and etching of carbonaceous materials. [37][38][39] Active suppression of residual H 2 O was found to be the second necessary prerequisite for the present study, and we discovered that the use of a low power RF remote plasma generator can not only eliminate the effects of organic contaminants, 40,41 but also those of residual water. It can therefore enable robust electron stimulated processing of surfaces, as is detailed below.…”

Section: Resultsmentioning

confidence: 74%

Deterministic Nanopatterning of Diamond Using Electron Beams

et al. 2018

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Diamond is an ideal material for a broad range of current and emerging applications in tribology, quantum photonics, high-power electronics, and sensing. However, top-down processing is very challenging due to its extreme chemical and physical properties. Gas-mediated electron beam-induced etching (EBIE) has recently emerged as a minimally invasive, facile means to dry etch and pattern diamond at the nanoscale using oxidizing precursor gases such as O and HO. Here we explain the roles of oxygen and hydrogen in the etch process and show that oxygen gives rise to rapid, isotropic etching, while the addition of hydrogen gives rise to anisotropic etching and the formation of topographic surface patterns. We identify the etch reaction pathways and show that the anisotropy is caused by preferential passivation of specific crystal planes. The anisotropy can be controlled by the partial pressure of hydrogen and by using a remote RF plasma source to radicalize the precursor gas. It can be used to manipulate the geometries of topographic surface patterns as well as nano- and microstructures fabricated by EBIE. Our findings constitute a comprehensive explanation of the anisotropic etch process and advance present understanding of electron-surface interactions.

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Section: Resultsmentioning

confidence: 74%

Deterministic Nanopatterning of Diamond Using Electron Beams

et al. 2018

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“…The localized Ar gas species is inert thus not suspected to contribute to the chemical etching of the carbonaceous matrix within the deposits, however inert gas flow has been shown to increase concentration of residual H 2 O adsorbates in the area of localized flux. 46 Hence, the purification mechanism envisioned is a multistep process where (1) Ar gas is locally injected by a GIS, (2) Residual H 2 O that contributes toward the thermally driven purification reaction have multiple possible origins from within the system. Specifically H 2 O molecules may be supplied from (1) outgassing of chamber walls, (2) outgassing of the substrate, or (3) from contamination in the inert gas line.…”

Section: Acs Applied Materials and Interfacesmentioning

confidence: 99%

Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits

Stanford

Lewis

Noh

et al. 2015

ACS Appl. Mater. Interfaces

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Electron-beam-induced deposition patterns, with composition of PtC5, were purified using a pulsed laser-induced purification reaction to erode the amorphous carbon matrix and form pure platinum deposits. Enhanced mobility of residual H2O molecules via a localized injection of inert Ar-H2 (4%) is attributed to be the reactive gas species for purification of the deposits. Surface purification of deposits was realized at laser exposure times as low as 0.1 s. The ex situ purification reaction in the deposit interior was shown to be rate-limited by reactive gas diffusion into the deposit, and deposit contraction associated with the purification process caused some loss of shape retention. To circumvent the intrinsic flaws of the ex situ anneal process, in situ deposition and purification techniques were explored that resemble a direct write atomic layer deposition (ALD) process. First, we explored a laser-assisted electron-beam-induced deposition (LAEBID) process augmented with reactive gas that resulted in a 75% carbon reduction compared to standard EBID. A sequential deposition plus purification process was also developed and resulted in deposition of pure platinum deposits with high fidelity and shape retention.

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“…However, the scalability of the progress is limited and the material is damaged during structuring. Future direct patterning by electron‐beam induced etching (EBIE) might circumvent this issue . A part of a photonic crystal cavity fabricated by ion milling is presented in Figure d.…”

Section: Fabrication Of Integrated Photonic Circuitsmentioning

confidence: 99%

“…Future direct patterning by electron-beam induced etching (EBIE) might circumvent this issue. [181][182][183] A part of a photonic crystal cavity fabricated by ion milling is presented in Figure 5d.…”

Section: Scd Nanophotonic Fabricationmentioning

confidence: 99%

Diamond as a Platform for Integrated Quantum Photonics

Lenzini¹,

Gruhler²,

Walter³

et al. 2018

Adv Quantum Tech

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Integrated quantum photonics enables the generation, manipulation, and detection of quantum states of light in miniaturized waveguide circuits. Implementation of these three operations in a single integrated platform is a crucial step toward a fully scalable approach to quantum photonic technologies. In this context, diamond has emerged as a particularly promising material as it naturally combines a large transparency range for the fabrication of low‐loss photonic circuits, and a variety of optically active defects for the realization of efficient single‐photon emitters. Furthermore, its high Young's modulus makes it ideal for the implementation of tunable optomechanical devices for active quantum state manipulation. This review reports recent progress on the realization of the main components required for a diamond‐based integrated quantum photonic architecture: single‐photon emitters, static and actively tunable waveguide circuits, and, as a last building block, integrated superconducting single‐photon detectors.

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Electron beam induced etching of carbon

Cited by 15 publications

References 41 publications

Deterministic Nanopatterning of Diamond Using Electron Beams

Deterministic Nanopatterning of Diamond Using Electron Beams

Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits

Diamond as a Platform for Integrated Quantum Photonics

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