Electron beam lithography on non-planar, suspended, 3D AFM cantilever for nanoscale thermal probing

Swami, Rahul; Julie, G; Singhal, Dhruv; Paterson, Jessy; Maire, Jérémie; Le-Denmat, S.; Motte, Jean Francois; Gomès, Séverine; Bourgeois, Olivier

doi:10.1088/2399-1984/ac7599

Cited by 3 publications

(2 citation statements)

References 50 publications

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“…Additionally, several platinum dots were selectively deposited along the NW length. These nanodots are expected to increase the tip-NW contact area [27,28] and thus reduce the high thermal contact resistance expected in vacuum [29] and homogenize this value along the NW. Indeed, the roughness of the NW is a challenge for vacuum-operated SThM and, furthermore, it presents a noticeable length dependence.…”

Section: System and Sample Descriptionmentioning

confidence: 99%

Local Heat Dissipation and Elasticity of Suspended Silicon Nanowires Revealed by Dual Scanning Electron and Thermal Microscopies

Sojo‐Gordillo,

Gadea‐Diez,

Renahy

et al. 2023

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A novel combined setup, with a scanning thermal microscope (SThM) embedded in a scanning electron microscope (SEM), is used to characterize a suspended silicon rough nanowire (NW), which is epitaxially clamped at both sides and therefore monolithically integrated in a microfabricated device. The rough nature of the NW surface, which prohibits vacuum‐SThM due to loose contact for heat dissipation, is circumvented by decorating the NW with periodic platinum dots. Reproducible approaches over these dots, enabled by the live feedback image provided by the SEM, yield a strong improvement in thermal contact resistance and a higher accuracy in its estimation. The results—thermal resistance at the tip‐sample contact of 188±3.7K µW−1 and thermal conductivity of the NW of 13.7±1.6W m−1 K−1—are obtained by performing a series of approach curves on the dots. Noteworthy, the technique allows measuring elastic properties at the same time—the moment of inertia of the NW is found to be (6.1±1.0) × 10−30m4—which permits to correlate the respective effects of the rough shell on heat dissipation and on the NW stiffness. The work highlights the capabilities of the dual SThM/SEM instrument, in particular the interest of systematic approach curves with well‐positioned and monitored tip motion.

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Section: System and Sample Descriptionmentioning

confidence: 99%

Local Heat Dissipation and Elasticity of Suspended Silicon Nanowires Revealed by Dual Scanning Electron and Thermal Microscopies

Sojo‐Gordillo,

Gadea‐Diez,

Renahy

et al. 2023

Small

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“…Researchers have developed a handful of processes to surmount patterning challenges, and an ideal solution would minimize chemical and hydrodynamic/mechanical perturbations to the delicate 3D biological structures. Float, 86 spray, 87 brush, 88 and thermally evaporative resist coating techniques 89,90 have all shown promise for patterning 3D micro-nanostructures comprised of hard condensed matter, such as atomic force microscopy cantilevers, which are held together via covalent bonds. But these methods employ perturbative processing steps, such as wet chemical developers.…”

Section: Future Prospects: Ice Lithographymentioning

confidence: 99%

Looking into a crystal ball: printing and patterning self-assembled peptide nanostructures

2022

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Experimental setup for thermal measurements at the nanoscale using a SThM probe with niobium nitride thermometer

Swami,

Julié,

Le-Denmat

et al. 2024

Review of Scientific Instruments

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Scanning Thermal Microscopy (SThM) has become an important measurement technique for characterizing the thermal properties of materials at the nanometer scale. This technique requires a SThM probe that combines an Atomic Force Microscopy (AFM) probe and a very sensitive resistive thermometer; the thermometer being located at the apex of the probe tip allows for the mapping of temperature or thermal properties of nanostructured materials with very high spatial resolution. The high interest of the SThM technique in the field of thermal nanoscience currently suffers from a low temperature sensitivity despite its high spatial resolution. To address this challenge, we developed a high vacuum-based AFM system hosting a highly sensitive niobium nitride (NbN) SThM probe to demonstrate its unique performance. As a proof of concept, we utilized this custom-built system to carry out thermal measurements using the 3ω method. By measuring the V3ω voltage on the NbN resistive thermometer under vacuum conditions, we were able to determine the SThM probe’s thermal conductance and thermal time constant. The performance of the probe is demonstrated by performing thermal measurements in-contact with a sapphire sample.

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Electron beam lithography on non-planar, suspended, 3D AFM cantilever for nanoscale thermal probing

Cited by 3 publications

References 50 publications

Local Heat Dissipation and Elasticity of Suspended Silicon Nanowires Revealed by Dual Scanning Electron and Thermal Microscopies

Local Heat Dissipation and Elasticity of Suspended Silicon Nanowires Revealed by Dual Scanning Electron and Thermal Microscopies

Looking into a crystal ball: printing and patterning self-assembled peptide nanostructures

Experimental setup for thermal measurements at the nanoscale using a SThM probe with niobium nitride thermometer

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