Electron‐beam‐pumped light sources using graphite nanoneedle field emitters and Si electron‐transparent films

Abstract

Sputter-induced carbon nanoneedle field emitters and Si electron-transparent films have been developed for electron-beam-pumped light sources. The sputter-induced carbon nanoneedle field emitters exhibited a stable electron emission of 0.1 mA at an average field of 13 V/µm. The 1.5-µm thick Si electron-transparent films achieved an electron transmittance of about 60% at an acceleration voltage of 27 kV. An electron-beam-pumped light source was demonstrated from the excitation of N 2 gas, and a N 2 gas spectrum was clearly observed. The increase of the beam current is important for increasing the light intensity. 