Electron beam radiation and its impacts to failure analysis in semiconductor industry

Liu, Binghai; Li, Xiaoming; Younan, Hua; Cho, Nan; Dong, Zhili; Zhao, Yuzhe; Ong, Kenny; Mo, Zhi Qiang

doi:10.1016/b978-0-08-101937-5.00002-6

Cited by 2 publications

(1 citation statement)

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“…Water radiolysis occurs in any residual water on radioactive oxide nanopowders and the subsequent reactions produce molecular hydrogen, the production of which must be understood and managed [6][7][8][9] . Furthermore, radiolysis is relevant to a wide range of fields, including nuclear corrosion 10 , radiation contamination in streams 11 , medical radioisotope production 12 , physical failure analysis in semiconductors 13 , radiation shielding 14 , and synthesizing bimetallic nanoparticles 15 .…”

Section: Introductionmentioning

confidence: 99%

A New Approach for Simulating Inhomogeneous Chemical Kinetics

Bradshaw

O’Leary

Purser

et al. 2023

Preprint

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In this paper, inhomogeneous chemical kinetics are simulated by describing the concentrations of interacting chemical species by a linear expansion of basis functions in such a manner that the coupled reaction and diffusion processes are propagated through time efficiently by tailor-made numerical methods. The approach is illustrated through modelling α− and γ−radiolysis in thin layers of water and at their solid interfaces from the start of the chemical phase until equilibrium was established. The method’s efficiency is such that hundreds of such systems can be modelled in a few hours using a single core of a typical laptop, allowing the investigation of the effects of the underlying parameter space. Illustrative calculations showing the effects of changing dose-rate and water-layer thickness are presented. Other simulations are presented which show the approach’s capability to solve problems with spherical symmetry (an approximation to an isolated radiolytic spur), where the hollowing out of an initial Gaussian distribution is observed, in line with previous calculations. These illustrative simulations show the generality and the computational efficiency of this approach to solving reaction-diffusion problems. Furthermore, these example simulations illustrate the method’s suitability for simulating solid-fluid interfaces, which have received a lot of experimental attention in contrast to the lack of computational studies.

show abstract

Section: Introductionmentioning

confidence: 99%

A New Approach for Simulating Inhomogeneous Chemical Kinetics

Bradshaw

O’Leary

Purser

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

A new approach for simulating inhomogeneous chemical kinetics

Bradshaw,

O’Leary,

Purser

et al. 2023

Sci Rep

View full text Add to dashboard Cite

In this paper, inhomogeneous chemical kinetics are simulated by describing the concentrations of interacting chemical species by a linear expansion of basis functions in such a manner that the coupled reaction and diffusion processes are propagated through time efficiently by tailor-made numerical methods. The approach is illustrated through modelling $$\alpha$$ α - and $$\gamma$$ γ -radiolysis in thin layers of water and at their solid interfaces from the start of the chemical phase until equilibrium was established. The method’s efficiency is such that hundreds of such systems can be modelled in a few hours using a single core of a typical laptop, allowing the investigation of the effects of the underlying parameter space. Illustrative calculations showing the effects of changing dose-rate and water-layer thickness are presented. Other simulations are presented which show the approach’s capability to solve problems with spherical symmetry (an approximation to an isolated radiolytic spur), where the hollowing out of an initial Gaussian distribution is observed, in line with previous calculations. These illustrative simulations show the generality and the computational efficiency of this approach to solving reaction-diffusion problems. Furthermore, these example simulations illustrate the method’s suitability for simulating solid-fluid interfaces, which have received a lot of experimental attention in contrast to the lack of computational studies.

show abstract

Electron beam radiation and its impacts to failure analysis in semiconductor industry

Cited by 2 publications

References 50 publications

A New Approach for Simulating Inhomogeneous Chemical Kinetics

A New Approach for Simulating Inhomogeneous Chemical Kinetics

A new approach for simulating inhomogeneous chemical kinetics

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