Electron-beam-sustained discharge revisited — light emission from combined electron beam and microwave excited argon at atmospheric pressure

Dandl, T.; Hagn, H.; Neumeier, A.; Wieser, J.; Ulrich, A.

doi:10.1140/epjd/e2014-50334-9

Cited by 1 publication

(1 citation statement)

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“…Electron beams can be generated by thermionic emission via cathode ray tube [8,9] or electric field emission via simple and compact electron sources based on a carbon nanotube (CNT) emitting matrix to produce low energy projectiles [10,11]. In electric field emission, under a sufficiently high external electrical field, electrons can escape from the metal surface to the vacuum level by tunneling.…”

Section: Introductionmentioning

confidence: 99%

Carbon nanotube generated electron beam produced plasmas

Masoud

Martus

Murnick

2019

Plasma Sources Sci. Technol.

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A device using an energetic electron beam from a carbon nanotube electron emitter has been developed to generate plasmas at pressures near or below atmospheric. The low-pressure electron source region (10 −6 mbar) and the higher pressure (up to 1 atmosphere) plasma generation region are separated by a 300 nm SiN x window/membrane. The energy of the electron beam is of the order of 10 kV with a current of 10 μA prior to passing through the window, with nearly 85% of the beam passing through the window to the plasma generation region with a 10% loss in energy. The device could be operated in one of two modes, closed or opened. Closed mode operation has been used to generate excimer emissions from XeI * and XeCl * at 253 nm and 308 nm, respectively, at pressures below atmospheric. Ambient air has been used in the open mode operation with and without a flow of argon or helium across the SiN x window. Optical emission spectroscopy revealed that the open mode operation yielded a variation of excited state species that was found to be dependent on the electron beam energy and the neutral gas flow in the reaction region.

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