Electron-Beam Synthesis of Zirconia Ceramic Coatings in the Forevacuum Pressure Range

Abstract

We report the results of our experimental investigations on the synthesis of ceramic protective coatings based on zirconium oxide stabilized with yttrium oxide (ZrO<sub>2</sub>-Y<sub>2</sub>O<sub>3</sub>) by electron-beam evaporation of a solid target in the forevacuum pressure range (5-50 Pa). The mass-to-charge composition of the beam plasma was measured in the course of target evaporation. The obtained thick coatings (over 100 μm) have a columnar structure. The article includes analysis of the factors that affect changes in morphology, hardness, and tribological properties of the obtained coatings.