2000
DOI: 10.1103/physreve.61.1875
|View full text |Cite
|
Sign up to set email alerts
|

Electron Boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge

Abstract: The electron distribution function (EDF) in an electron cyclotron resonance (ECR) discharge is far from Maxwellian. The self-consistent simulation of ECR discharges requires a calculation of the EDF on every magnetic line for various ion density profiles. The straightforward self-consistent simulation of ECR discharges using the Monte Carlo technique for the EDF calculation is very computer time expensive, since the electron and ion time scales are very different. An electron Boltzmann kinetic equation average… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
40
1

Year Published

2002
2002
2022
2022

Publication Types

Select...
8
2

Relationship

0
10

Authors

Journals

citations
Cited by 43 publications
(42 citation statements)
references
References 27 publications
1
40
1
Order By: Relevance
“…27 We note that for Maxwellian electron EDF and xenon plasma, ε w ≈7.77T e and the experimental electron-wall collision frequency is However, it is unclear what physical mechanisms could keep SEE low when the electron temperature is so high. A truncation of the electron EDF at high energy is known to affect the sheath potential drop.…”
Section: B Determination Of Plasma Parametersmentioning
confidence: 82%
“…27 We note that for Maxwellian electron EDF and xenon plasma, ε w ≈7.77T e and the experimental electron-wall collision frequency is However, it is unclear what physical mechanisms could keep SEE low when the electron temperature is so high. A truncation of the electron EDF at high energy is known to affect the sheath potential drop.…”
Section: B Determination Of Plasma Parametersmentioning
confidence: 82%
“…A similar depletion effect of wall losses on electron EDF is also known in other types of low-pressure gas discharges. 21 For HTs, because of a small SEE, a minor contribution of electron-wall collisions is expected to the electron transport. 17,19,20 According to a conventional model of electron-wall interaction [7][8][9][10]17 , the frequency of electron-wall collisions depends on the electron flux and the channel geometry,…”
mentioning
confidence: 99%
“…[31] the capacitive discharge, in Ref. [43] the electron-cyclotron-resonance discharge, and in Ref. [44] the surface-wave discharge were considered with self-consistent account for collisionless heating.…”
Section: Self-consistent System Of Equations For a Kinetic Descrimentioning
confidence: 99%