Electron cyclotron resonance plasma and thermal oxidation mechanisms of germanium

Wang, Y.; Hu, Y. Z.; A., Irene, E.

doi:10.17615/1cc0-nc36

1994

DOI: 10.17615/1cc0-nc36

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Electron cyclotron resonance plasma and thermal oxidation mechanisms of germanium

Y. Wang¹,

Y. Z. Hu²,

Irene, E. A.³

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Electron cyclotron resonance plasma and thermal oxidation mechanisms of germanium

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