1997
DOI: 10.1063/1.120183
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Electron emission from boron nitride coated Si field emitters

Abstract: Electron emission characteristics of sulfur (S)-doped boron nitride (BN) films synthesized by plasma-assisted chemical vapor deposition (PACVD) are investigated. The BN film consists of hexagonal grains of 3 nm in size. The energy gap is estimated to be as wide as 6.0 eV from ultraviolet-visible optical transmission measurement. The electrical resistivity is reduced to 4.9×102 Ω cm. Si tip field emitters coated with the BN film are fabricated. The electron emission occurs at an electric field as low as 6 V/μm,… Show more

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Cited by 96 publications
(49 citation statements)
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“…A careful study of the microstructure of the crystallized film using transmission electron microscope images showed evidence of columnar Si nanocrystals around 90 nm in height and around 50 nm in diameter, surrounded by grain boundaries. The observation of FE at an applied field of 15 V/µm compares favorably with that of emission from Si nanowires ~15 V/µm [19], from poly-Si by LPCVD with oxidation sharpening [20] and poly-Si microtips [21] at ~20 V/µm as well as from single c-Si microtips [22] at around 20 V/ µm.…”
Section: Nanosilicon Based Materials Cathodessupporting
confidence: 51%
“…A careful study of the microstructure of the crystallized film using transmission electron microscope images showed evidence of columnar Si nanocrystals around 90 nm in height and around 50 nm in diameter, surrounded by grain boundaries. The observation of FE at an applied field of 15 V/µm compares favorably with that of emission from Si nanowires ~15 V/µm [19], from poly-Si by LPCVD with oxidation sharpening [20] and poly-Si microtips [21] at ~20 V/µm as well as from single c-Si microtips [22] at around 20 V/ µm.…”
Section: Nanosilicon Based Materials Cathodessupporting
confidence: 51%
“…This is comparable to many other emitters such as carbon nanotubes 12 and boron nitride coated Si tips. 13 The Fowler-Nordheim ͑FN͒ plot corresponding to the data in Fig. 4͑a͒ is shown in Fig.…”
mentioning
confidence: 99%
“…Figure 5 shows the FE current density as a function of the applied field as a current density versus electric field (J-E) plot, and the inset shows a ln(J/E ) and threshold field (defined to be the electric field required to generate a current density of 1 mA cm -2 ) for the AlN nanostructures were found to be about 3.8 and 7 V lm -1 , respectively. Although the value of the turn-on field from the AlN nanostructure on a sapphire substrate is higher than the best value found for carbon nanotubes [13] and SiC, [14] they are much lower than those of many other types of emitters such as carbon nitride, [15] Si nanostructures, [16] MoO 3 nanobelts, [17] and ZnO nanowires. [18] In a previous study, the selection of the substrate was found to be critical to the FE properties of AlN nanostructures.…”
mentioning
confidence: 99%