Articles you may be interested inEffect of parameters on carbon nanotubes grown by floating catalyst chemical vapor deposition AIP Conf. Proc. 1502, 242 (2012); 10.1063/1.4769148 Effect of ZnO catalyst on carbon nanotube growth by thermal chemical vapor deposition J. Vac. Sci. Technol. B 26, 1765 (2008); 10.1116/1.2981084 Particle size dependence and model for iron-catalyzed growth of carbon nanotubes by thermal chemical vapor deposition J. Appl. Phys. 93, 4185 (2003); 10.1063/1.1559433Variations in structure and emission characteristics of nanostructured carbon films prepared by the hot-filament chemical-vapor-deposition method due to the addition of ammonia in the source The effects of deposition parameters and NH 3 pretreatment on the size and distribution of Pd catalytic particles and subsequently their effects on the characteristics of the synthesized carbon nanotubes ͑CNTs͒ were systematically investigated. It was found that the size of Pd particles decreases and the particle density ͑total number of Pd particles per unit area͒ increases as the Pd film thickness decreases. Moreover, pretreatment of Pd film in NH 3 gas promotes smaller Pd particles and higher particle density which is beneficial for CNT growth. The CNTs were synthesized by thermal chemical vapor deposition at 750°C using methane ͑CH 4 ͒ as the carbon source, and a mixture of Ar/H 2 ͑80 vol %: 20 vol %͒ as a carrier gas with NH 3 serving as a processing reagent. The incorporation of NH 3 in CNT synthesis, per the specific pretreatment of catalytic film, has a distinct effect on the size and morphology of CNTs produced. The interrelation between processing, structure and emission behavior of CNTs produced with different synthesis conditions was examined by scanning electron microscopy, transmission electron microscopy, Raman spectroscopy, and field emission measurements.