1974
DOI: 10.1007/bf00891118
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Electron energy distribution and inelastic collisions in a negative glow plasma

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Cited by 2 publications
(2 citation statements)
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“…Boltzmann's transport equation was the subject for solution to derive particle energy distributions in (56)(57)(58)(59). Experimental determinations of electron energy distributions were made by (60)(61)(62). References (72)(73)(74)(75) solve the equation and go on to derive swarm parameters in N2 or N2-SF6 mixtures.…”
Section: Energy Distributionsmentioning
confidence: 99%
“…Boltzmann's transport equation was the subject for solution to derive particle energy distributions in (56)(57)(58)(59). Experimental determinations of electron energy distributions were made by (60)(61)(62). References (72)(73)(74)(75) solve the equation and go on to derive swarm parameters in N2 or N2-SF6 mixtures.…”
Section: Energy Distributionsmentioning
confidence: 99%
“…In a dc discharge, the EEDF measurements are technically simpler and have dramatically better sensitivity than in an afterglow plasma since temporal resolution is not required. However, previous probe measurements of the EEDF in the vicinity of the cathode [9], using a cylindrical Langmuir probe, demonstrated that although electrons from the plasma-chemical processes were observable, it could not be used for analytical purposes as the measured EEDF was significantly distorted and the maxima were poorly resolved.…”
Section: Introductionmentioning
confidence: 99%