Stretched exponential relaxation has been observed in various phenomena of hydrogenated amorphous silicon (a‐Si:H) and hydrogenated polymorphous silicon (pm‐Si:H). As an example, we take light‐induced defect creation in a‐Si:H and pm‐Si:H, in which defect‐creation process and defect‐annihilation process via hydrogen movement play important roles. We have performed the Monte Carlo simulation for hydrogen movement. Hydrogen movement exhibits anomalous diffusion. In our model of light‐induced defect creation in a‐Si:H, a pair of two types of dangling bonds, i.e., a normal dangling bond and a hydrogen‐related dangling bond, that is a dangling bond having hydrogen in the nearby site, are created under illumination, and hydrogen dissociated from the hydrogen‐related dangling bond terminates a normal dangling bond via hydrogen movement. The amorphous network reflects on the dispersive parameter of the stretched exponential function in the light‐induced defect creation. We discuss this issue, taking into account the difference in the amorphous network between a‐Si:H and pm‐Si:H (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)