A brief review of the electron collision studies of perfluorocarbons and SF 6 relevant to plasma is presented. The use of these gases in various applications of plasma is highlighted, and their possible replacement with gases that have a low global warming potential is suggested. The results for a few simple fluorocarbons are presented, i.e., C 2 F 2 , C 3 F 4 , and C 4 F 6 for elastic scattering and C 2 F 6 for ionization, and the requirement for further investigation is highlighted. This review is not extensive; however, it presents an important step towards understanding the lack of cross-section data for numerous fluorocarbon molecules/radical species. In addition, it highlights the requirement for the detailed study of fluoroketones and fluoronitriles, which are possible substitutes for SF 6 for various electron collisional processes other than ionization.