Electron induced ionization of plasma processing gases: C4Fx(x  =  1–8) and the isomers of C4F6and C4F8

Gupta, Dhanoj; Choi, Hyung Rim; Kwon, Deuk-Chul; Yoon, Jung‐Sik; Song, Mi‐Young

doi:10.1088/1361-6463/aab1e3

Cited by 10 publications

(4 citation statements)

References 55 publications

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“…This enables us to find the consistent or recommended sets of data for Q ion . The studies by Gupta et al for the ionization of C 2 F x (x = 1 6), C 3 F x (x = 1 8) [34], and C 4 F x (x = 1 8) [35] neutral and radical species have shown that the use of the DFT (ωB97X) functional may be suitable for fluorocarbon containing species when compared with recent experimental and theoretical data in general. Hence, such functionals can be used for further studies of ionization.…”

Section: Resultsmentioning

confidence: 99%

“…In recent years, there has been an increase in the research on PFCs for various electron collision processes with the objective of their quantifying cross sections. A complete study of Q ion has been performed for C 2 F x (x = 1 6), C 3 F x (x = 1 8) [34], and C 4 F x (x = 1 8) [35] neutral and radical species using the BEB method. The BEB and CSP-ic methods are briefly described in Section 2.…”

Section: Introductionmentioning

confidence: 99%

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Brief Review of Electron Collision Studies of Molecules Relevant to Plasma

Gupta

2020

Appl. Sci. Converg. Technol.

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A brief review of the electron collision studies of perfluorocarbons and SF 6 relevant to plasma is presented. The use of these gases in various applications of plasma is highlighted, and their possible replacement with gases that have a low global warming potential is suggested. The results for a few simple fluorocarbons are presented, i.e., C 2 F 2 , C 3 F 4 , and C 4 F 6 for elastic scattering and C 2 F 6 for ionization, and the requirement for further investigation is highlighted. This review is not extensive; however, it presents an important step towards understanding the lack of cross-section data for numerous fluorocarbon molecules/radical species. In addition, it highlights the requirement for the detailed study of fluoroketones and fluoronitriles, which are possible substitutes for SF 6 for various electron collisional processes other than ionization.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Brief Review of Electron Collision Studies of Molecules Relevant to Plasma

Gupta

2020

Appl. Sci. Converg. Technol.

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“…111) The total ionization cross-sections for perfluorocarbons, such as C 4 F 6 and C 4 F 8 , were calculated using the binary-encounter Bethe method. 112) Various types of analyses of C 4 F 8 plasma were performed, and the dissociation of CF 2 via C 2 F 4 was presumed based on the analysis of the results. 113) Thereafter, the electronic excited states of C 4 F 8 were calculated.…”

Section: 5mentioning

confidence: 99%

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Kambara

Kawaguchi

Lee

et al. 2022

Jpn. J. Appl. Phys.

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Low-temperature plasma processing technologies is essential for material synthesis, device fabrication, and surface treatment. The development of plasma-related products and services requires an understanding of the multiscale complex behaviors of plasma and the hierarchical integration of plasma generation, energy and mass transports through sheath region, surface reactions, and other processes. The importance of science-based and data-driven approaches to controlling systems is argued. The state-of-the-art of deep learning, machine learning, and artificial intelligence in low-temperature plasma science and technology is reviewed. In this review, the requirements and challenges for plasma parameter prediction and processing recipe discovery are asserted by researchers in the fields of material science and plasma processing. It also outlined a science-based, data-driven approach for development of virtual metrology in plasma processes.

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“…The ionization collision cross-section can be calculated by the binary-encounter-Bethe (BEB) method [35], Deutsch-Märk (DM) method [36][37][38], and so on [39]. The BEB and DM methods have been improved and successfully used to calculate the ionization collision cross-section for new ecofriendly insulation gases (e.g., C 4 F 8 O, C 4 F 7 N, C 5 F 10 O, C 6 F 12 O [40][41][42][43][44][45][46]). Although the existing methods can provide the cross-sections for calculating α/N, there are still some problems to be solved.…”

Section: Introductionmentioning

confidence: 99%

Prediction models of the ionization coefficient and ionization cross-section based on multi-layer molecular parameters

Qiu¹,

Zhou²,

Zheng³

et al. 2023

Plasma Sci. Technol.

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The prediction models were proposed to estimate the reduced Townsend ionization coefficient and ionization cross-section. A shape function of the reduced Townsend ionization coefficient curves was derived from the ionization collision probability model. The function had three parameters: the first ionization potential energy, Aα, and Bα. Aα and Bα were related to the molecule symmetry and size. The polarization of molecules could characterize the molecule’s symmetry. The multi-layer molecular cross-section (MMCS) was proposed to describe the contribution of electrons and molecule radius on different molecule surfaces to collisions. A prediction model of the ionization cross-section was also proposed based on Aα. The molecule parameters were calculated by the Beck3-Lee-Yang-Parr (B3LYP) method and the 6-311G** basis set. We used available data of 30 and 23 gases, respectively, to build the prediction models of reduced Townsend ionization coefficients and ionization cross-sections. The relationships among molecular parameters, Aα, Bα, and ionization cross-section were built up via nonlinear fittings. The determination coefficients R2 of the Aα, Bα, and ionization cross-section are 0.877, 0.887, and 0.838, respectively. The results showed that the accuracy of models positively correlated with the molecule’s symmetry and reduced electric field. That was mainly related to the accuracy of the MMCS model in predicting Aα. The MMCS model needed to be improved to describe the collision direction selectivity caused by the molecule asymmetry. Under a high reduced electric field, that error of Aα had less influence on the prediction results. However, the prediction results for single atoms with high symmetry were poor. That may be due to the absolute error of the model close to single atoms’ reduced Townsend ionization coefficients. The models could provide the basis for gas insulation prediction and discharge calculations, especially for symmetric molecules under high electric field.

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Electron induced ionization of plasma processing gases: C₄F_x(x = 1–8) and the isomers of C₄F₆and C₄F₈

Cited by 10 publications

References 55 publications

Brief Review of Electron Collision Studies of Molecules Relevant to Plasma

Brief Review of Electron Collision Studies of Molecules Relevant to Plasma

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Prediction models of the ionization coefficient and ionization cross-section based on multi-layer molecular parameters

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