2008
DOI: 10.1088/0022-3727/41/20/205412
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Electron irradiation effects on the properties of heavily phosphorus-doped a-Si : H films prepared from undiluted silane

Abstract: The effects of 1.0 MeV electron irradiation on the dark conductivity and amorphous network of heavily phosphorus-doped a-Si : H films have been studied. The electron irradiation leads to a strong decrease by about two orders of magnitude in the dark conductivity of heavily phosphorus-doped a-Si : H films and the degradation comes to a saturation. The evolutions of the amorphous silicon network of heavily doped a-Si : H films caused by electron irradiation were investigated by Raman spectroscopy. The observed d… Show more

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Cited by 10 publications
(5 citation statements)
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“…One possible explanation for this phenomenon is that the high hydrogen content makes the network of a-Ge: NPs different from those of μc-Ge:H and a-Ge:H thin films which finally causes such an additional Raman peak from 500 to 600 cm −1 . The Raman spectra of a-Ge:H NP samples synthesised under different RH (9,19,29) conditions are shown in Fig. 3b.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…One possible explanation for this phenomenon is that the high hydrogen content makes the network of a-Ge: NPs different from those of μc-Ge:H and a-Ge:H thin films which finally causes such an additional Raman peak from 500 to 600 cm −1 . The Raman spectra of a-Ge:H NP samples synthesised under different RH (9,19,29) conditions are shown in Fig. 3b.…”
Section: Resultsmentioning
confidence: 99%
“…It is noted that the local mode at ∼116 cm −1 was attributed to the Ge–H x bonds at the NP surface [28] and the appearance of the local mode further manifested the high hydrogen content in the a‐Ge:H NPs network. It is well known that the width of TO peak (Γ TO ) and the location of TO peak ( ω TO ) are associated with the short‐range order of the amorphous network [26], and the presence of the LA peak is due to the coordination defects in the amorphous network [29]. Figs.…”
Section: Resultsmentioning
confidence: 99%
“…[39][40][41][42][43], and the increase in I LA /I TO reflects the increase in defects and stress in the material. 44 The #SiC-ML1 is predominantly microcrystalline with a sharp (Lorentzian)…”
Section: Discussionmentioning
confidence: 99%
“…1 the spectra over the wavenumber range from 100 to 600 cm À 1 can be decomposed into four Gaussian peaks, corresponding to transverse optical (TO) mode centered at about 480 cm À 1 , longitudinal optical (LO) mode at about 380 cm À 1 , longitudinal acoustic (LA) mode at about 300 cm À 1 and transverse acoustic (TA) mode at about 140 cm À 1 [12]. The frequency ω TO and linewidth Γ TO of TO mode are dependent on the short range order of amorphous Si network, as their values are sensitive to the nearest-neighbor bond-angle fluctuations [12,13]. An increase of short range order of electron beam irradiated Si films is manifested by a decrease of Γ TO from 47.8 to 46.3 cm À 1 and a blue-shift of ω TO from 485.5 to 487.8 cm À 1 .…”
Section: Methodsmentioning
confidence: 99%