Electron kinetics in non-uniform glow discharge plasmas

Tsendin, L. D.

doi:10.1088/0963-0252/4/2/004

Cited by 261 publications

(216 citation statements)

References 13 publications

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“…Within λ ε , the EEDF is nonlocal and does not depend on the spatial coordinate as a function of full (kinetic and potential) energy [6]. If the electron energy relaxation length is greater than the plasma volume size, L, (this is the nonlocal EEDF in the volume), the EEDF is the same at any point of the plasma, as a function of full electron energy and therefore can be measured by the wall probe for the entire volume.…”

Section: Basics Of the Wall Probe Methodsmentioning

confidence: 99%

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Short DC Discharge with Wall Probe as a Gas Analytical Detector

Demidov

Adams

Blessington

et al. 2010

Contrib. Plasma Phys.

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A new approach leading to the development of gas analytical detectors is reported. The approach is based on measurements in the near-cathode plasma of fine structures associated with atomic and molecular plasma processes of the high energy portion of the electron energy distribution function (EEDF). A short (without positive column) dc discharge with cold cathode and conducting walls was used. The EEDF measurements in a dc discharge are technically simpler and have dramatically better sensitivity than in the afterglow since temporal resolution is not required. Additional increased probe sensitivity is achieved by using a large-area, larger-radius-of-curvature conducting wall as the probe instead of the more common thin cylindrical Langmuir probe. The wall probe, being almost flat, also greatly reduces the ion current contribution to the measurements. The new approach allows for the development of micro-analytical, dc plasma electron spectroscopy (PLES) gas detectors that are operational up to atmospheric pressure.

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Section: Basics Of the Wall Probe Methodsmentioning

confidence: 99%

“…[4,5]. Under the condition of nonlocal EEDF [6], energetic electrons, arising from different plasma-chemical reactions, do not lose their energies in the plasma volume giving rise to characteristic maxima in the EEDF. Measurements of the high energy portion of the EEDF can, therefore, give analytical information about the gas mixture.…”

Section: Introductionmentioning

confidence: 99%

Short DC Discharge with Wall Probe as a Gas Analytical Detector

Demidov

Adams

Blessington

et al. 2010

Contrib. Plasma Phys.

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“…The nonlocal approach has been successfully applied to the self-consistent kinetic modelling of various low-pressure discharges: the capacitively coupled plasmas [28][29][30][31], the inductively coupled plasmas [32][33][34][35], the dc discharges [36,37], the afterglow [38], and the surface-wave discharges [39]. Additional references can be found in reviews [40][41][42].…”

Section: Self-consistent System Of Equations For a Kinetic Descrimentioning

confidence: 99%

Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating

Kaganovich¹,

Polomarov²,

Theodosiou³

2004

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In low-pressure discharges, where the electron mean free path is larger or comparable with the discharge length, the electron dynamics is essentially nonlocal. Moreover, the electron energy distribution function (EEDF) deviates considerably from a Maxwellian. Therefore, an accurate kinetic description of the low-pressure discharges requires knowledge of the nonlocal conductivity operator and calculation of the non-Maxwellian EEDF. The previous treatments made use of simplifying assumptions: a uniform density profile and a Maxwellian EEDF. In the present study a self-consistent system of equations for the kinetic description of nonlocal, nonuniform, nearly collisionless plasmas of low-pressure discharges is reported. It consists of the nonlocal conductivity operator and the averaged kinetic equation for calculation of the non-Maxwellian EEDF. This system was applied to the calculation of collisionless heating in capacitively and inductively coupled plasmas. In particular, the importance of accounting for the nonuniform plasma density profile for computing the current density profile and the EEDF is demonstrated. The enhancement of collisionless heating due to the bounce resonance between the electron motion in the potential well and the external rf electric field is investigated. It is shown that a nonlinear and self-consistent treatment is necessary for the correct description of collisionless heating.

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“…When EEDF is formed in nonlocal regime [5], i.e. electron energy relaxation length is greater than the characteristic discharge dimension L, > L, the electrons move in discharge volume with conservation of their full energy w e (r) (kinetic plus potential).…”

Section: Introductionmentioning

confidence: 99%

Collisional electron spectroscopy method for gas analysis

Stefanova

Pramatarov

Kudryavtsev

et al. 2016

J. Phys.: Conf. Ser.

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Abstract.Recently developed collisional electron spectroscopy (CES) method, based on identification of gas impurities by registration of groups of nonlocal fast electrons released by Penning ionization of the impurity particles by helium metastable atoms, is verified experimentally. Detection and identification of atoms and molecules of gas impurities in helium at pressures of 14 -90 Torr with small admixtures of Ar, Kr, CO2, and N2 are carried out. The nonlocal negative glow plasma of short dc microdischarge is used as most suitable medium. Records of the energy spectra of penning electrons are performed by means of an additional electrode -sensor, located at the boundary of the discharge volume. Maxima appear in the electron energy spectra at the characteristic energies corresponding to Penning ionization of the impurity particles by helium metastable atoms. IntroductionThe plasma electron spectroscopy (PLES) method, developed by Kolokolov at al.[1] represents a new approach for studies of elementary plasma processes and atomic constants. On the base of the PLES method a new method for identification of gas impurities is proposed by Kudryavtsev [2]. It is based on identification of gas impurities by registration of groups of nonlocal fast electrons, released in reaction of Penning ionization of the impurity particles by helium metastable atoms. Further development of PLES method for identification of unknown species in a gas phase is reported in [3]. In [1-3] the nonlocal afterglow plasma of positive column at low pressures (0.5 -3.5 Torr) is used, and temporal resolution of the registration system is applied, which complicates the devices.In this paper the new method of collisional electron spectroscopy (CES), whose basic principles are patented by Kudryavtsev at al. [4] is experimentally veryfied. The CES method is based on measurements of energy spectra R( ) of fast electrons released in Penning ionization of the impurities atoms or molecules by metastable atoms of the main gas:

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Electron kinetics in non-uniform glow discharge plasmas

Cited by 261 publications

References 13 publications

Short DC Discharge with Wall Probe as a Gas Analytical Detector

Short DC Discharge with Wall Probe as a Gas Analytical Detector

Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating

Collisional electron spectroscopy method for gas analysis

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