Electron spin resonance studies of poly(methyl methacrylate) irrdiated with monochromatic light

Chemical and structural modifications in a 193-nm photoresist after low-k dry etch

“…2C). This is in agreement with PMAs chain scissionning mechanisms proposed in the literature [10,18], either by direct main chain scission or by disproportionation after loss of a complete ester side-group, leading to the formation of end-chain CfC bonds and a propagating radical (Fig. 5A(1)).…”

Physical properties of MgCl2-filled PMMA films for optical applications

“…Some researchers consider that the complete spectrum can be attributed to single radicals and a propagating radical in the polymerization of methyl methacrylate [19]. Other researchers believe that two radicals are present, with a five-line and four-line spectrum, respectively, and that the superposition of these spectra produces the observed nine-line spectrum [20]. For the case of W > 0:0 wt%, the spectrum is characterized by a broad (incomplete and deformed) Lorentzian signal, which indicates the presence of an aggregated form of Mg [21].…”

Data on Specific Polymers

“…598 Direct main chain scission produces well resolved nine-line ESR spectrum. 598 The above reaction of direct chain scission occurs on exposure to radiation wavelength of 300 nm. Thus this reaction can occur when PMMA is exposed to sunlight.…”