2013
DOI: 10.1109/tps.2013.2252025
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Electron Temperature Evolution in a Low-Pressure Dusty RF Nitrogen-Rich Methane Plasma

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Cited by 11 publications
(14 citation statements)
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“…An important increase of the electron temperature and a strong decrease of the electron density were measured when dust particles became detectable in the plasma which confirms the transition character of the discharge sustaining. 18,19 At the final stage of the dusty plasma period, when dust particles gradually disappear from the discharge a large asymmetric void was observed in our discharge. 4,19 According to Samsonov and Goree, 14 the instabilities of dusty plasma and the subsequent creation of a void in the dust cloud are due to the following mechanisms: (i) the electrons are depleted in the dust cloud; (ii) the onset of the variation of plasma parameters is triggered by a specific particle size; (iii) the ionization in the plasma bulk is enhanced, visually represented by an enhanced plasma glow; (iv) the ion drag force is partly responsible for the void formation.…”
Section: Introductionmentioning
confidence: 72%
See 1 more Smart Citation
“…An important increase of the electron temperature and a strong decrease of the electron density were measured when dust particles became detectable in the plasma which confirms the transition character of the discharge sustaining. 18,19 At the final stage of the dusty plasma period, when dust particles gradually disappear from the discharge a large asymmetric void was observed in our discharge. 4,19 According to Samsonov and Goree, 14 the instabilities of dusty plasma and the subsequent creation of a void in the dust cloud are due to the following mechanisms: (i) the electrons are depleted in the dust cloud; (ii) the onset of the variation of plasma parameters is triggered by a specific particle size; (iii) the ionization in the plasma bulk is enhanced, visually represented by an enhanced plasma glow; (iv) the ion drag force is partly responsible for the void formation.…”
Section: Introductionmentioning
confidence: 72%
“…It was shown in the literature that the optical emission spectrum of dusty plasmas is modulated by the dust formation/disappearance cycle. 4,10,18,19 In our previous work, we have shown that the oscillations of the Ar emission lines in HMDSO-Ar RF discharges is directly related to the presence of dust particles. 4 Indeed, it was demonstrated that enhancement of the Ar lines emission is related to dust formation whereas the reduction of these emissions corresponds to disappearance of the dust particles from the discharge.…”
Section: A Mass Spectrometry Detection Of Neutral Speciesmentioning
confidence: 96%
“…Dust formation induces perturbations in the plasma. Monitoring of electron density and self‐bias current can thus inform on the apparition time of the dust . It was not possible to measure this parameters during the experiments presented here, but measurements done on similar experiments give an apparition time of typically a few tens of seconds (20–30 s) …”
Section: Resultsmentioning
confidence: 98%
“…Monitoring of electron density and self-bias current can thus inform on the apparition time of the dust. [24,25] It was not possible to measure this parameters during the experiments presented here, but measurements done on similar experiments give an apparition time of typically a few tens of seconds (20-30 s). [1] This time corresponds to the maximum of H 2 concentration, reached after a few tens of second, while CH 4 is still decreasing.…”
Section: Products Kineticsmentioning
confidence: 98%
“…as nanoparticles are growing). This change can be related to the electron temperature increase during nanoparticle growth [2]. On the contrary, detected carbonaceous line intensities first increase and then decrease as observed for C 2 (Swan band system around 516.52 nm), CN (violet system around 388.34 nm) and CH (Gerö band around 431.42 nm).…”
Section: Optical Emission Spectroscopymentioning
confidence: 88%