1968
DOI: 10.1080/00207216808938015
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Electron temperature in a.c. glow discharge at audio frequencies†

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Cited by 4 publications
(3 citation statements)
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“…[7] Reference [8] contains the result of using 15 kHz luminous chemical vapour deposition of hydrocarbon polymeric thin films in a magnetic field enhanced discharge of methane. Some earlier work by Bhiday, et al [9] involved measurements of the electron temperature and electron densities in up to 20 kHz discharges using the double probe method. Their results show that the electron temperature is almost independent of the frequency.…”
mentioning
confidence: 99%
“…[7] Reference [8] contains the result of using 15 kHz luminous chemical vapour deposition of hydrocarbon polymeric thin films in a magnetic field enhanced discharge of methane. Some earlier work by Bhiday, et al [9] involved measurements of the electron temperature and electron densities in up to 20 kHz discharges using the double probe method. Their results show that the electron temperature is almost independent of the frequency.…”
mentioning
confidence: 99%
“…This may be due to two main reasons. The first stems from the theoretical arguments that as far as capacitive coupling is concerned, one would not expect to observe any major differences between dc and audio frequency discharge [4] due to the relaxation time properties of plasmas. [5] On the other hand and as far as inductive coupling is concerned, one would need to use very high power audio generators to induce any discharge.…”
mentioning
confidence: 99%
“…The electron density n e and the electron temperature T e were diagnosed by a Langmuir probe in laboratory investigations [22,23]: n e = (1-2) • 10 8 cm −3 and T e = 5-7 eV for the dc mode. There are some indications that the lowfrequency polarity switching does not significantly change the plasma conditions [27,28].…”
mentioning
confidence: 99%