2004
DOI: 10.1364/opex.12.001464
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Electronic color charts for dielectric films on silicon

Abstract: This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into RGB parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon.

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Cited by 96 publications
(98 citation statements)
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“…The chromaticity is compatible with Figure 7 in [27] or Figure 2b in [9] for the normal reflection (u = 0). We observe that for a thin ARC (single mode regime), the color (Fig.…”
Section: Achievable Color Space Depending On the Position Of The Obsesupporting
confidence: 77%
“…The chromaticity is compatible with Figure 7 in [27] or Figure 2b in [9] for the normal reflection (u = 0). We observe that for a thin ARC (single mode regime), the color (Fig.…”
Section: Achievable Color Space Depending On the Position Of The Obsesupporting
confidence: 77%
“…The Si wafer with 300 nm thermal SiO 2 was selected because the phase contrast between the monolayer membrane and the wafer results in a shift from violet-blue to blue (34). For all transferred films, we observed flat, continuous films largely free of defects over areas of several square millimeters (Fig.…”
Section: Resultsmentioning
confidence: 85%
“…An Oxygen flow 100 standard cubic centimeter cubic per minute (sccm) at ambient pressure was applied on a Si(100) wafer during 340 minutes to produce a SiO2 layer with 300 nm thick 12 , which was estimated by the time of synthesis and blueviolet color 13 of samples. The CuO films were deposited over the substrate at room temperature by DC sputtering, using a standard 2 SPI Moduleℱ Sputter/ Carbon Coaters with a Quartz Crystal Thickness Monitor system was used.…”
Section: Methodsmentioning
confidence: 99%