“…Furthermore, in previous works, the microwave plasma torch has been investigated in various applications such as the abatement of CF 4 , NF 3 and SF 6 , the elimination of chemical and biological warfare agents, and synthesis of carbon nanotube, titanium dioxide, titanium nitride, and zinc oxide (Hong et al, 2004;Kim et al, 2007). Although the microwave plasma torch in air discharge provides high plasma density and high gas temperature in inexpensive ways (Green, 2001), the plasma volume and temperature of the microwave plasma torch decrease drastically outside the discharge tube, thereby limiting its capability of bulk treatment of waste. For example, the gas flow rates in the treatment experiments of CF 4 and phosgene were only tens of liters per minute (lpm), although high destruction and removal efficiency more than 96% had been accomplished Hong et al, 2005).…”