Electronic excitations of CH<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:msub><mml:mrow/><mml:mn>2</mml:mn></mml:msub></mml:math>Cl<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:msub><mml:mrow/><mml:mn>2</mml:mn></mml:msub></mml:math> studied by fast electron scattering

Nie, Zhi-Wei; Wang, Shu-Xing; Ma, Kang; Wang, Lihan; Xu, Yuan-Chen; Du, Xiao-Jiao; Zhu, Lin-Fan

doi:10.1016/j.jqsrt.2022.108227

Cited by 1 publication

(1 citation statement)

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“…The reliability of relative flow technique has been demonstrated in our previous works, for example, the fast electron scattering by N 2 [32] and O 2 [42], and the measurements agree well with the inelastic x-ray scattering results. It should be also noted that the relative flow technique can be applied to heavy samples, for example, in the measurement of CCl 4 [43], CH 2 Cl 2 [44], CH 3 Cl [45] and CF 4 [46]. The total experimental errors on the present GOSs are less than 15% for most dipole-allowed transitions and less than 40% for the weak dipole-forbidden transition.…”

Section: Experimental Methodsmentioning

confidence: 75%

Plasma-relevant fast electron impact study of difluoromethane

Wang

Zhu

et al. 2023

Plasma Sources Sci. Technol.

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Difluoromethane (CH2F2) is a commonly used etching gas in manufacturing very-large-scale integrated circuits as the fluorine source. Electron impact excitation cross sections for CH2F2 are important input data for modeling the reactive etching plasmas. In this work, we present the experimental generalized oscillator strengths for the 3s ← 2b2, 11A2 ←X 1A1, and 3p ← 2b2 transitions on the absolute scale. The measurement was realized by employing the crossed-beam based relative flow technique at an angle-resolved electron energy loss spectrometer, operating at an incident energy of 1500 eV and a resolution of 80 meV. The dipole-forbidden transition 11A2 ←X 1A1 at around 9.7 eV is identified for the first time. The measured data are fitted with the well-known Lassettre formula to yield analytical expressions and optical oscillator strengths at K2 = 0 for dipole-allowed transitions. The analytical expressions enable integrations over momentum transfer to obtain the Born integral cross sections for electron impact excitations from the threshold to 5000 eV. The integral cross sections for dipoleallowed transitions are scaled to a more reliable level by using the BE-scaling method. The experimental data can benchmark theoretical calculations and supplement the molecular database for plasma modelers.

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