A new process for nanoscale fabrication of ordered monolayer films of conjugated organic molecules is presented. The process makes it possible to grow sexithiophene monolayers (T6) at precise locations on a silicon substrate with a high degree of order while preserving the orientation of growth. The process is based on the integration of local oxidation nanolithography of the substrate and template growth of the molecular thin film. The former is used to fabricate silicon oxide arrays of parallel lines of 30−50 nm in width and several microns in length. Template growth arises from the interplay between kinetic growth parameters and preferential interactions with the patterned surface. The result is a monolayer film of organic molecules that conformally mimicks the features of the fabricated motives. This approach could be used to connect molecular domains of well-defined size between metallic electrodes.New approaches for the fabrication of planar devices based on materials by design are critical for the development of organic electronics. 1-6 Assembling devices by self-organization of functional elements that take the proper position and shape and establish connections with the other components is a major aim of nanotechnologies. The advantage of this approach is two-fold. On one hand, the possibility to implement additive manufacturing, 1 viz. the usage of the optimum amount of material needed for the performance of the device; and on the other hand, the capability of tailoring the relevant properties of those devices such as charge mobility, spin coherence length, charge separation or radiative relaxation by controlling the lateral size of the active material to a few tens of nanometers. 7-9 Since the length scales of transport phenomena in conjugated materials are in the nanometer range, optimizing the organization at the nanometer scale would lead to an enhancement of the transport properties.Currently there is not an established fabrication approach for conjugated materials that allows to preset the position, size, and shape of domains. Consolidated thin film growth techniques in organic electronics, such as spin casting and organic molecular beam deposition (OMBD) lack the control of lateral size of the domains, due to random nucleation on one hand, and coalescence of uncorrelated domains on the other hand. 10 In this letter we report a new process for the fabrication of molecularly ordered nanostructures made of sexithienyl (T6) on a silicon oxide template. The method yields monolayer stripes or wires, whose width ranges from few tens up to a few hundred nanometers. These low-dimensional structures are grown at predetermined positions on the substrate, their shape and size being controlled by a template fabricated on the substrate. The molecules on the template maintain their orientation with their long axis normal to the substrate, viz. the same orientation as those forming islands outside the template.The process is based on the integration of local oxidation nanolithography of the substrate and templat...