Electrostatic Actuation of Three-Dimensional MEMS Mirrors Using Sidewall Electrodes

Pu, Chuan; Park, Sangtae; Chu, Patrick; Lee, Shi-Sheng; Tsai, Ming Lin Julius; Peale, D. R.; Bonadeo, N.; Brener, Igal

doi:10.1109/jstqe.2004.828480

Cited by 34 publications

(14 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Electrostatic actuation is widely used in MEMS devices. Except for micropumps and microvalves in microfluidic applications, other examples also can be found in electrostatic micro motors (Trimmer and Gabriel 1987), electrostatic micro mirrors (Pacheco et al 2000;Pu et al 2004), and electrostatic micro switches and relays (Gretillat 1999).…”

Section: Electrical Actuationmentioning

confidence: 99%

Current micropump technologies and their biomedical applications

Amirouche

Zhou

Johnson³

2009

Microsyst Technol

296

169

View full text Add to dashboard Cite

This paper briefly reviews recent research and developments of micropump designs with a particular emphasis on mechanical micropumps and summarizes their applications in biomedical fields. A comprehensive description of the actuation schemes, flow directing concepts and liquid chamber configurations for micro pumping is provided with illustrative diagrams. Then, a comparative study of current mechanical micropump designs highlighting their advantages and limitations for various applications is presented, based on performance criteria such as actuation voltage and power consumption, ranges of operating frequency and maximum flow rate and backpressure. This study compiles and provides some basic guidelines for selection of the actuation schemes and flow rate requirements in biomedical applications. Different micropumps in biomedical applications, such as blood transport and drug delivery also have been reviewed.

show abstract

Section: Electrical Actuationmentioning

confidence: 99%

Current micropump technologies and their biomedical applications

Amirouche

Zhou

Johnson³

2009

Microsyst Technol

296

169

View full text Add to dashboard Cite

show abstract

“…This facilitated electromagnetic characterization using THz-TDS. However, in actual operation, it will be possible to actively reorient the SRRs using well-developed actuation techniques which include resistive, piezoelectric, and elec-trostatic actuation [21][22][23]. Potential applications include reconfigurable filters, negative index surfaces, thermal cantilever-based detection, or fine tuning of the electric or magnetic response for optimizing perfect absorbers or transformation optics derived metamaterials such as cloaks or concentrators.…”

mentioning

confidence: 99%

Reconfigurable Terahertz Metamaterials

et al. 2009

View full text Add to dashboard Cite

We demonstrate reconfigurable anisotropic metamaterials at terahertz frequencies where artificial "atoms" reorient within unit cells in response to an external stimulus. This is accomplished by fabricating planar arrays of split ring resonators on bimaterial cantilevers designed to bend out of plane in response to a thermal stimulus. We observe a marked tunability of the electric and magnetic response as the split ring resonators reorient within their unit cells. Our results demonstrate that adaptive metamaterials offer significant potential to realize novel electromagnetic functionality ranging from thermal detection to reconfigurable cloaks or absorbers.

show abstract

“…We found that maximal electrode ramp angles produced the highest performing plate actuator devices, except in the case of the hidden post spring, where the center cutout in the electrodes to allow for the post negated the benefit of the ramped electrodes. Complex electrode designs can improve device performance [20], [21], but to maintain the large scope of our study, we focused on the most common designs, illustrated in Fig. 4.…”

Section: B Tilt Mirror Electrostatic Actuationmentioning

confidence: 99%

Scaling Limits of MEMS Beam-Steering Switches for Data Center Networks

Mellette

Ford

2015

J. Lightwave Technol.

View full text Add to dashboard Cite

Transparent optical circuit switching can improve the aggregate bandwidth, scalability, and cost of data center networks, provided it can meet the performance requirements on switching speed, port count, and optical efficiency. Here, we examine the theoretical scaling limits of transparent nonblocking optical switches based on MEMS electrostatic tilt mirror devices. Using physical optics and electromechanics, we present a first principles analysis of how the response speeds of a set of canonical devices scale as a function of switch port count, crosstalk, and insertion loss. Our model indicates that the optimal actuator design (parallel plate versus vertically offset comb) and actuation method (digital versus analog) changes as a function of switch port count. It also suggests that conventional switch topologies do not allow a favorable tradeoff between switching speed and optical efficiency or crosstalk. However, high switching speeds can be achieved by multistage switch architectures such as the two examples we describe, a multiport wavelength switch and a wavelength-independent space switch.Index Terms-Microelectromechanical systems, optical communication systems, optical design, optical fiber switches.

show abstract

Electrostatic Actuation of Three-Dimensional MEMS Mirrors Using Sidewall Electrodes

Cited by 34 publications

References 7 publications

Current micropump technologies and their biomedical applications

Current micropump technologies and their biomedical applications

Reconfigurable Terahertz Metamaterials

Scaling Limits of MEMS Beam-Steering Switches for Data Center Networks

Contact Info

Product

Resources

About