2015
DOI: 10.1016/j.snb.2015.04.118
|View full text |Cite
|
Sign up to set email alerts
|

Electrostatic gas sensor with a porous silicon diaphragm

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
8
0

Year Published

2016
2016
2018
2018

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 14 publications
(8 citation statements)
references
References 22 publications
0
8
0
Order By: Relevance
“…The early stages of PS-based application research are focused mainly on the development of optoelectronic devices such as light emitting diodes (LED) and waveguides [34,35]. However, development of optoelectronic devices using a PS layer is limited by several problems.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…The early stages of PS-based application research are focused mainly on the development of optoelectronic devices such as light emitting diodes (LED) and waveguides [34,35]. However, development of optoelectronic devices using a PS layer is limited by several problems.…”
Section: Introductionmentioning
confidence: 99%
“…Since the observation of PL from PS, there has been much interest in recent years on the structural and optical properties of PS due to its potential use in Si-based optoelectronic devices and sensors. The early stages of PS-based application research are focused mainly on the development of optoelectronic devices such as light emitting diodes (LED) and waveguides [ 34 , 35 ]. However, development of optoelectronic devices using a PS layer is limited by several problems.…”
Section: Introductionmentioning
confidence: 99%
“…The active area A of the device is 2 mm 2 . AC conductance and capacitance of the samples were measured in the frequency range between 20 Hz and 10 6 Hz using HP 4276A LCR meter in a microprocessor-controlled system. The amplitude of the alternating signal was 100 mV peak-to-peak with no DC bias.…”
Section: Methodsmentioning
confidence: 99%
“…1 Investigations have also been carried into this PS material for its potential applications in the field of optoelectronics, 2,3 drug delivery, 4 gas and biosensors 5,6 and biomedical devices. 7 The study of electrical properties of PS layers therefore becomes important to exploit these developments with further success.…”
Section: Introductionmentioning
confidence: 99%
“…This technique allows for us to design multilayer structures that are based on porous silicon, like distributed Bragg reflectors (DBRs) [ 1 , 2 , 3 ], rugate filters [ 3 , 4 ], and microcavities (MC) [ 5 , 6 , 7 ]. Furthermore, due to the high internal surface area of Psi, all of the devices mentioned above are good candidates for sensing biological and chemical substances [ 8 , 9 , 10 ] and gas [ 11 , 12 , 13 ]. The microcavities can be obtained for different wavelengths within the Vis-IR range on a silicon substrate.…”
Section: Introductionmentioning
confidence: 99%