Electrostatic stabilization of thermal variation in quality factor using anchor loss modulation

Abstract

We report an ultra-low energy dissipation silicon MEMS tuning fork resonator with a Q-factor of over 2 million at 570 Hz, with the ability of Q-factor stabilization throughout a temperature range of over 100 o C. This stabilization approach relies on the controlling of energy dissipation through regulating the stiffness misbalance of the tuning fork resonator. Without Q-factor regulation, the resonator demonstrates a Q-factor with a 25% drift from 2.14 million to 2.67 million, over a temperature range from 40 °C to +60 °C. With implementation of the proposed stabilization method, the experimental characterization reveals a stable Q-factor of 2.14 million within 0.3% (+1σ) variation for an identical temperature range ( 40 °C to +60 °C).

Experimental Study of Nuclear Gyro Bias Compensation Using the Quality Factor Estimation

“…Currently, there are many methods for monitoring and evaluating the quality factor of an oscillatory circuit [8,9]. Unfortunately, the existing methods and systems are not suitable for the system under consideration.…”