Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment

Schmid, Silvan; Senn, Philipp; Hierold, Christofer

doi:10.1016/j.sna.2008.01.010

Cited by 30 publications

(21 citation statements)

References 20 publications

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“…This is typically called the oscillator or the positive feedback technique. This has been tried by many different groups in different types of implementations [19][20][21][22][23][24][25][26][27][28][29][30]. 5.10 (a) Schematic of a self-sustained oscillator system.…”

Section: Self-sustained Oscillatormentioning

confidence: 99%

Measurement and Noise

Schmid

Villanueva

Roukes

2016

Fundamentals of Nanomechanical Resonators

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Max Planck used to say that the only things that exist are those that can be measured. In this chapter a general vision of the issues faced while performing measurements of nanomechanical resonators is presented. Different noise sources are analyzed: thermomechanical noise, electrical noise (Johnson, 1=f , shot noise), and amplifier noise; to later define the Allan variance and how it relates to frequency noise. This chapter will provide the reader with the necessary information and tools to understand the basics of measurements and to maybe motivate further reading beyond these pages.

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Section: Self-sustained Oscillatormentioning

confidence: 99%

Measurement and Noise

Schmid

Villanueva

Roukes

2016

Fundamentals of Nanomechanical Resonators

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“…Whilst AFM cantilevers have been traditionally made from silicon or silicon nitride due to the ease at which they are fabricated using standard MEMS techniques, polymers, such as SU-8 have been shown to be a promising alternative [1,2]. Polymers have always been useful in various MEMS fabrication processes, usually as a mask or sacrificial layer [3], but with the recent development of polymers with excellent mechanical properties and chemical stability they are increasingly being used as a structural material [4].…”

Section: Introductionmentioning

confidence: 99%

“…Polymeric materials typically have a Young's modulus and density lower than their silicon-based counterparts [5]. This results in cantilevers with high mass [1] and surface stress [6] sensitivity. These mechanical attributes, coupled with polymers ability to absorb chemicals and accept surface modifications such as gold-thiol chemistry and direct coating with analyte molecules [6] has lead to polymeric cantilevers being used for a number of chemical sensing [7] and biosensing applications [8].…”

Section: Introductionmentioning

confidence: 99%

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Fabrication and analysis of cylindrical resin AFM microcantilevers

et al. 2011

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a b s t r a c tIn this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.

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“…Based on this actuation scheme, dielectric microresonators made from polymeric materials have been successfully actuated in vacuum 22 and in air and water. 23 Lately, the dielectric force has also been applied in nanomechanical systems actuating silicon nitride strings. 24 The movement of the dielectric beam induces a change of the capacitance over the two electrodes, which can be used for the readout of the beam movement.…”

Section: Introductionmentioning

confidence: 99%

Modeling the Kelvin polarization force actuation of micro- and nanomechanical systems

Schmid

Hierold

Boisen

2010

Journal of Applied Physics

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Polarization forces have become of high interest in micro-and nanomechanical systems. In this paper, an analytical model for a transduction scheme based on the Kelvin polarization force is presented. A dielectric beam is actuated by placing it over the gap of two coplanar electrodes. Finite element method simulations are used to characterize the scheme and to evaluate a field correction factor, which results from simplifying the form of the electric field. The model has been shown to be valid for dielectrics with different permittivities. The presented model facilitates the design of microresonators and nanoresonators with dielectric actuation, which offers a great freedom in the choice of structural material.

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Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment

Cited by 30 publications

References 20 publications

Measurement and Noise

Measurement and Noise

Fabrication and analysis of cylindrical resin AFM microcantilevers

Modeling the Kelvin polarization force actuation of micro- and nanomechanical systems

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