2003
DOI: 10.1007/s00542-002-0244-0
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Electrostatically driven film light modulators for display applications

Abstract: Electrostatic film based light modulators are discussed. Electrostatically driven microstructures can close or open parts of a transparent substrate modulating the incident light. The surface of the microstructures can be used as shutter or as mirror or simultaneously in both functions. Photolithography and thin film technologies have been used to build microshutter-micromirror arrays. Refractive, diffractive and micro-optical systems based on glasses or polymers can be combined with the presented arrays in in… Show more

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Cited by 22 publications
(10 citation statements)
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“…Likewise, metal-based but in the relaxed state nonplanar (i.e., curled/rolled), in contrast, are optical MEMS that are usually called shutter arrays [12][13][14][15][16][17] or microblinds. 18 Shutter-array-based MOEMS have been reported for transmission modulated smart glass, 12,18 space instrumentation, 13 camera shutters, 15 and displays.…”
Section: Introductionmentioning
confidence: 99%
See 2 more Smart Citations
“…Likewise, metal-based but in the relaxed state nonplanar (i.e., curled/rolled), in contrast, are optical MEMS that are usually called shutter arrays [12][13][14][15][16][17] or microblinds. 18 Shutter-array-based MOEMS have been reported for transmission modulated smart glass, 12,18 space instrumentation, 13 camera shutters, 15 and displays.…”
Section: Introductionmentioning
confidence: 99%
“…18 Shutter-array-based MOEMS have been reported for transmission modulated smart glass, 12,18 space instrumentation, 13 camera shutters, 15 and displays. 16,19 These MOEMS shutter arrays are curled in the open state and unrolled by electrostatic actuation to obtain the flat closed condition. One type of these MOEMS is shutter systems defined as rolled elements found in many different application fields.…”
Section: Introductionmentioning
confidence: 99%
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“…5(a)]. 33,34 They did not reveal much about the fabrication; nevertheless, their microshutters are relatively big (0.5 to 2 mm) and required around 80 V actuation voltage. Modeling results were obtained in collaboration with the Université de Bordeaux.…”
Section: Fiat Italymentioning
confidence: 99%
“…Microblinds were also compared with other switchable glass technologies in review papers 14,15 and market reports. [19][20][21] Several groups have worked on various versions of microshutters, namely NRC, 17 New Visual Media Group (NVMG), 22,23 University of Kassel, 24,25 Institut National d'Optique (INO), 26 University of Tokyo, 27 Samsung, 28 U.S. Air Force (USAF), 29 Korea Advanced Institute of Science and Technology (KAIST), 30,31 Microelectronic Center of North Carolina (MCNC), 32 Fiat, 33,34 and University of Stuttgart. 35 These groups used various versions of curling electrodes actuated by electrostatic forces for switchable glass applications (window, display, imaging, eyewear, etc.).…”
Section: Introductionmentioning
confidence: 99%