Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage

Preston, Daniel J.; Anders, Ariel; Barabadi, Banafsheh; Tio, Evelyn; Zhu, Yangying; Dai, DingRan Annie; Wang, Evelyn N.

doi:10.1109/memsys.2017.7863521

Cited by 4 publications

(3 citation statements)

References 24 publications

(21 reference statements)

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“…The tubes were then dipped into a 2.0 M hydrochloric acid solution for 10 min to remove the native oxide film on the surface, then triple-rinsed with DI water and dried with clean nitrogen gas. Nanostructured CuO films were formed by immersing the cleaned tubes (with ends capped) into a hot (96 ± 3 °C) alkaline solution composed of NaClO 2 , NaOH, Na 3 PO 4 ·12H 2 O, and DI water (3.75:5:10:100 wt %). − During the oxidation process, a thin (∼300 nm) Cu 2 O layer was formed that then reoxidized to form sharp, knife-like CuO structures with heights of h ≈ 1 μm, solid fraction φ ≈ 0.038, and roughness factor r ≈ 4.…”

Section: Materials and Methodsmentioning

confidence: 99%

Design of Lubricant Infused Surfaces

Preston

Song

et al. 2017

ACS Appl. Mater. Interfaces

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Lubricant infused surfaces (LIS) are a recently developed and promising approach to fluid repellency for applications in biology, microfluidics, thermal management, lab-on-a-chip, and beyond. The design of LIS has been explored in past work in terms of surface energies, which need to be determined empirically for each interface in a given system. Here, we developed an approach that predicts a priori whether an arbitrary combination of solid and lubricant will repel a given impinging fluid. This model was validated with experiments performed in our work as well as in literature and was subsequently used to develop a new framework for LIS with distinct design guidelines. Furthermore, insights gained from the model led to the experimental demonstration of LIS using uncoated high-surface-energy solids, thereby eliminating the need for unreliable low-surface-energy coatings and resulting in LIS repelling the lowest surface tension impinging fluid (butane, γ ≈ 13 mN/m) reported to date.

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Section: Materials and Methodsmentioning

confidence: 99%

Design of Lubricant Infused Surfaces

Preston

Song

et al. 2017

ACS Appl. Mater. Interfaces

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“…An important application using the ultra-high voltage produced by MKWDs is electrowetting [ 16 ]. Electrowetting has been widely used in lab-on-a-chip devices for biomedical analysis and diagnostics [ 16 ], electronic display (e-paper) [ 17 ], tunable filter fibers [ 18 ], optical application [ 19 ], and microfluidic manipulation [ 20 , 21 , 22 ]. Electrowetting is a technique used to manipulate the wetting properties of a substrate under an external electric field [ 23 ].…”

Section: Introductionmentioning

confidence: 99%

Electrowetting Using a Microfluidic Kelvin Water Dropper

2018

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The Kelvin water dropper is an electrostatic generator that can generate high voltage electricity through water dripping. A conventional Kelvin water dropper converts the gravitational potential energy of water into electricity. Due to its low current output, Kelvin water droppers can only be used in limited cases that demand high voltage. In the present study, microfluidic Kelvin water droppers (MKWDs) were built in house to demonstrate a low-cost but accurately controlled miniature device for high voltage generation. The performance of the MKWDs was characterized using different channel diameters and flow rates. The best performed MKWD was then used to conduct experiments of the electrowetting of liquid on dielectric surfaces. Electrowetting is a process that has been widely used in manipulating the wetting properties of a surface using an external electric field. Usually electrowetting requires an expensive DC power supply that outputs high voltage. However, in this research, it was demonstrated that electrowetting can be conducted by simply using an MKWD. Additionally, an analytic model was developed to simulate the electrowetting process. Finally, the model’s ability to well predict the liquid deformation during electrowetting using MKWDs was validated.

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“…[6][7][8] Among these methods, EWOD has become a popular topic and a useful technology in academic research worldwide relative to other driving forces or control methods due to special advantages, such as straightforward fabrication, low cost, compatibility with conductive or polar fluids, and convenient programmable control. The effect changes the electron distribution in droplets, and the force of static electricity changes the contact angle of droplets, enabling diverse applications, such as micro-valves, 9 focal lenses, [10][11][12][13] fibers, 14,15 screens, 16,17 transport, [18][19][20][21][22][23][24] printing, 25 transistors, 26 electrical switches, 27,28 thermal control 29,30 and thermal management. 31 An increasing number of studies have applied the advantage of EWOD to be amplified in micro-systems, particularly for micro-optical devices, because droplets can adjust the focal length by changing the radius of curvature, using the properties of droplet flexibility with an applied voltage.…”

Section: Introductionmentioning

confidence: 99%

Optimization and limit of a tilt manipulation stage based on the electrowetting-on-dielectric principle

et al. 2017

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This work designed a new tilt manipulation stage based on the electrowetting-on-dielectric (EWOD) principle as the actuating mechanism and investigated the performance of that stage. The stage was fabricated using a universal MEMS (Micro-Electro-Mechanical System) fabrication method. In the previously demonstrated form of this device, the tilt stage consisted of a top plate that functions as a mirror, a bottom plate that was designed for changing the shape of water droplets, and supporters that were fixed between the top and bottom plate. That device was actuated by a voltage applied to the bottom plate, resulting in a static electric force actuating the shape change in the droplets by moving the top plate in the vertical direction. Previous experimental results indicated that that device can tilt at up to ±1.8°, with a resolution of 7 μm in displacement and 0.05° in angle. By selecting the best combination of the dielectric layer, the tilt angle was maximized. The new device, fabricated using a common and straightforward fabrication method, avoids deflection of the top plate and grounding in the bottom plate. Because of the limit of Teflon and other MEMS materials, this device has a tilt angle in the range of 3.2-3.5° according to the experimental data for friction and the EWOD device limit, which is close to 1.8°. This paper also describe the investigation of the effects of various parameters, e.g., various dielectric materials, thicknesses, and droplet type and volume, on the performance of the stage. The results indicate that the apparent frictions coefficient of the solid-liquid interface may remain constant, i.e., the friction force is proportional to the normal support force and the apparent frictions coefficient.

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Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage

Cited by 4 publications

References 24 publications

Design of Lubricant Infused Surfaces

Design of Lubricant Infused Surfaces

Electrowetting Using a Microfluidic Kelvin Water Dropper

Optimization and limit of a tilt manipulation stage based on the electrowetting-on-dielectric principle

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