Elektromechanische Systeme der Mikrotechnik und Mechatronik

Ballas, Rüdiger G.; Pfeifer, Günter; Werthschützky, Roland

doi:10.1007/978-3-540-89320-2

Cited by 21 publications

(14 citation statements)

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“…Since we do not want to discuss the absolute values for the oscillation amplitude of the sensor, we did not use a conversion factor for calculating the electric elements as it is suggested by others (Ballas et al, 2009) but instead simply used the analogies in Table 1. The values for the mechanical elements have been determined from experiments (Körner et al, 2015), and the mass m i of each cantilever beam equals the effective mass given by the beam's spring constant k i and its eigenfrequency f i after the frequency matching process:…”

Section: Electric Circuit Model Of the Co-resonant Sensormentioning

confidence: 99%

“…We employed an inductor in the translational part in order to allow for modelling of the external interaction with the environment if desired. These boundary conditions are specific to our sensor set-up, but other boundary conditions can be found in Lenk et al (2001) and Ballas et al (2009). Figure 18 depicts the Bode plots for both cantilevers, showing the first two vibrational modes for the microcantilever.…”

Section: Circuit Model For a Beam With Shear And Torsionmentioning

confidence: 99%

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Employing electro-mechanical analogies for co-resonantly coupled cantilever sensors

Körner

Reiche

Büchner

et al. 2016

J. Sens. Sens. Syst.

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Abstract. Understanding the behaviour of mechanical systems can be facilitated and improved by employing electro-mechanical analogies. These analogies enable the use of network analysis tools as well as purely analytical treatment of the mechanical system translated into an electric circuit. Recently, we developed a novel kind of sensor set-up based on two coupled cantilever beams with matched resonance frequencies (co-resonant coupling) and possible applications in magnetic force microscopy and cantilever magnetometry. In order to analyse the sensor's behaviour in detail, we describe it as an electric circuit model. Starting from a simplified coupled harmonic oscillator model with neglected damping, we gradually increase the complexity of the system by adding damping and interaction elements. For each stage, various features of the coupled system are discussed and compared to measured data obtained with a co-resonant sensor. Furthermore, we show that the circuit model can be used to derive sensor parameters which are essential for the evaluation of measured data. Finally, the much more complex circuit representation of a bending beam is discussed, revealing that the simplified circuit model of a coupled harmonic oscillator is a very good representation of the sensor system.

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Section: Electric Circuit Model Of the Co-resonant Sensormentioning

confidence: 99%

Section: Circuit Model For a Beam With Shear And Torsionmentioning

confidence: 99%

Employing electro-mechanical analogies for co-resonantly coupled cantilever sensors

Körner

Reiche

Büchner

et al. 2016

J. Sens. Sens. Syst.

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show abstract

“…The behavior of sensors and actuators can be described with the aid of lumped circuit elements (LCE), if the wavelength of the underlying physical fields (e.g., electrical field, mechanical field) are large compared to the dimensions of the devices [2,3]. For instance, these lumped elements can be standard components of mechanics (spring, mass, damper) or electrical networks (resistor, inductor, capacitor).…”

Section: Lumped Circuit Elements (Lce)mentioning

confidence: 99%

“…Moreover, these tools often allow the observation of effects inside the devices which are not accessible by measurement technology. Possible approaches for the computer design are based on the finite element method (FEM), boundary element method (BEM) as well as lumped circuit elements (LCE) [1,2,3]. In this contribution, we will concentrate on FEM and LCE.…”

Section: Introductionmentioning

confidence: 99%

B2.3 - Design of Sensors and Actuators Utilizing Computer Tools

Rupitsch¹,

Sutor²,

Albach³

et al. 2011

Proceedings SENSOR 2011

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“…Dafür wurden für die Simulation die akustischen Nachgiebigkeiten, die akustischen Reibungen sowie die akustischen Massen der Topologie abgeschätzt. Diese diskreten Werte sind für einen eingeschränkten Frequenzbereich als konstant anzunehmen [6].…”

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Analyse des Übertragungsverhaltens von Differenzdrucksensoren durch dynamische DruckkalibrierungAnalyzing Frequency Response of Differential Pressure Sensors by Dynamic Pressure Calibration

Kober¹,

Sindlinger

Werthschützky

2010

Tm - Technisches Messen

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Zusammenfassung Stand der Technik bei Differenzdrucksensoren für die Prozessmesstechnik ist ein Nennmessbereich von Δp N = 10 mbar bei einem statischen Nenndruck bis p Stat = 160 bar. Dabei wird eine Messunsicherheit ≤ 2×10 -3 angestrebt. Drucksensoren für raue Umgebungsbedingungen, deren Verformungskörper aus Silizium besteht, benötigen metallische Trennmembranen zur Medientrennung. Zum Schutz des Meßelementes vor zu hoher statischer und dynamischer Druckbelastung werden spezielle mechanische Überlastschutzvorrichtungen verwendet. Um zuverlässige Überlastschutzsysteme zu entwickeln, wird deren Frequenzcharakteristik experimentell durch eine neuartige dynamische Druckquelle ermittelt.Summary The state of the art differential pressure sensors for process instrumentation is characterized by a nominal measuring range of Δp N = 10 mbar at a nominal static pressure of p Stat = 160 bar and an uncertainty of measurement ≤ 2×10 -3 . Environmentally robust pressure sensors based on silicon deformation bodies require static and dynamic overload protections as well as metallic media separation diaphragms. With adapted electromechanical network topology analysis the amplitude and phase response is estimated for differential pressure sensors. For developing reliable overload protection systems and determining the nominal frequency range the dynamic amplitude and phase responses, tested by a dynamic pressure source, are essential.

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Elektromechanische Systeme der Mikrotechnik und Mechatronik

Cited by 21 publications

References 0 publications

Employing electro-mechanical analogies for co-resonantly coupled cantilever sensors

Employing electro-mechanical analogies for co-resonantly coupled cantilever sensors

B2.3 - Design of Sensors and Actuators Utilizing Computer Tools

Analyse des Übertragungsverhaltens von Differenzdrucksensoren durch dynamische DruckkalibrierungAnalyzing Frequency Response of Differential Pressure Sensors by Dynamic Pressure Calibration

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