Eliminating the influence of source spectrum of white light scanning interferometry through time-delay estimation algorithm

Zhou, Yunfei; Cai, Hongzhi; Zhong, Liu; Qiu, Xiang; Tian, Jing; Liu, Xiaoxu

doi:10.1016/j.optcom.2016.12.006

Cited by 8 publications

(2 citation statements)

References 20 publications

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“…The peak positions of the fringe envelope along the scanning direction are measured, which corresponds to the height of the surface [57,58]. To achieve the accurate zero OPD position, Zhou et al [59] employed a laser Michelson interferometry system to calibrate the displacement of the PZT stage in an SWLI system.…”

Section: Coherence Scanning Interferometrymentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

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Section: Coherence Scanning Interferometrymentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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“…Nevertheless, despite many advantages of these instruments, there are lots of limitations for measuring the micro structures with a high aspect ratio. For instance, the profiles of the MEMS devices' sidewall and bottom cannot be measured without destroying the devices' structures under real-time conditions [4,5].…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional profile measurement of micro-electro-mechanical systems structures based on infrared light reflection interference

Shi¹,

Han²

2017

Laser Phys.

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A new method of measuring the three-dimensional (3D) profile of micro-electro-mechanical systems (MEMS) structures based on infrared light reflection interference is developed in this paper. The application of reflection interference technology in a 3D profile reconstruction is extended from white light to infrared light. The measurement system comprised an infrared light source, an interference microscope, an infrared light charge-coupled device, a ceramic piezo and a data acquisition system. The 3D profile of the MEMS device structures was obtained by vertical scanning interferometry and it is consistent with the scanning electron microscope image. The results indicate that the lateral resolution is 0.18 um and the vertical resolution is 1 nm.

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Research on determining the position of zero optical path difference with the wavelet transform

Qin

Han

et al. 2023

Optoelectron. Lett.

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Eliminating the influence of source spectrum of white light scanning interferometry through time-delay estimation algorithm

Cited by 8 publications

References 20 publications

Development of surface reconstruction algorithms for optical interferometric measurement

Development of surface reconstruction algorithms for optical interferometric measurement

Three-dimensional profile measurement of micro-electro-mechanical systems structures based on infrared light reflection interference

Research on determining the position of zero optical path difference with the wavelet transform

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