Elimination of the Nonlinearity of Heterodyne Displacement Interferometers

Hou, Wenmei; Zhang, Yunbo; Le, Yanfen; Ju, Aisong

doi:10.3788/cjl201239.0908006

中国激光

2012

DOI: 10.3788/cjl201239.0908006

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Elimination of the Nonlinearity of Heterodyne Displacement Interferometers

Wenmei Hou¹,

Yunbo Zhang²,

Yanfen Le³

et al.

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Features of an acousto-optical two-channel laser displacement interferometer with multi-frequency photodetectors with subpycometer resolution

Leun

2022

J. Phys.: Conf. Ser.

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The article discusses the issues of improving acousto-optical (AO) heterodyne laser displacement interferometers (LDI) by using two independent multi-frequency photodetectors: high- frequency (HF) and low-frequency (LF) low-noise, working with "fast inaccurate" and "slow accurate" measuring channels, respectively. The "fast inaccurate" channel allows you to measure displacements with high velocity peed movements. The scheme of the "slow accurate" channel is based on the joint operation of a phase-locked frequency system and a small-range phase meter, providing high resolution for low velocity. Such a scheme of AO LDI most fully implements its capabilities in the control of start-stop cyclic movements of objects, providing high resolution at the initial and final stages of movements with low velocity. A metrological analysis of the "slow accurate" channel is carried out, the possibilities and conditions for achieving AO LDI at low velocity of subpicometer resolution are shown.

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Features of an acousto-optical two-channel laser displacement interferometer with multi-frequency photodetectors with subpycometer resolution

Leun

2022

J. Phys.: Conf. Ser.

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外差干涉相位测量中信号串扰误差与补偿方法研究

Yang Weilei,

Liu Yang,

He Mingzhao

et al. 2023

中国激光

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Elimination of the Nonlinearity of Heterodyne Displacement Interferometers

Cited by 2 publications

References 0 publications

Features of an acousto-optical two-channel laser displacement interferometer with multi-frequency photodetectors with subpycometer resolution

Features of an acousto-optical two-channel laser displacement interferometer with multi-frequency photodetectors with subpycometer resolution

外差干涉相位测量中信号串扰误差与补偿方法研究

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